Programmable Phase Plate for Charged Particle Beam Shaping
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Solution Overview
Problem
Current methods for manipulating charged particle beams lack the ability to dynamically and programmably configure the spatial phase distribution, limiting their versatility and efficiency in applications such as electron microscopy and lithography.
Innovation Solution
A device comprising a support element with a two-dimensional array of phase adjusting elements, connected by control lines, allows for individual control of each phase adjusting element to dynamically configure the spatial phase distribution of charged particle beams, enabling the creation of various beam profiles like vortex waves, Bessel beams, and aberration correction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conventional phase plates or static phase manipulating elements are used, then the device structure is simple, but the ability to dynamically and programmably configure spatial phase distribution is lost
Solution Approach 1:
The phase plate is divided into multiple independently controllable segments or zones. Each segment can be individually addressed by control lines to adjust its phase shift, enabling dynamic configuration of the overall phase distribution without requiring a completely complex new device architecture.
Solution Approach 2:
The phase plate transitions from a static structure to a dynamic one where the phase shift of different regions can be changed in real-time. This is achieved through controllable elements (such as variable thickness regions or adjustable refractive index materials) that respond to control signals, allowing programmable phase distribution while maintaining a relatively simple base structure.
2Adaptability or versatility
If conventional lenses and phase plates are used, then the beam manipulation capability is limited, but the device cost and size are reduced
Solution Approach 1:
The phase plate is designed to perform multiple functions: it can create vortex beams, Bessel beams, correct aberrations, and generate various other beam profiles. By integrating these capabilities into a single programmable device, the system replaces multiple specialized optical elements (different lenses and phase plates) with one multi-functional component, reducing overall system complexity and cost.
Solution Approach 2:
The phase plate utilizes controllable parameters (such as thickness variations, refractive index changes, or geometric configurations) to achieve different beam manipulation effects. By changing these parameters dynamically, the device can adapt to different application requirements without requiring physical replacement of components, thereby enhancing versatility while controlling device complexity.
3Productivity
If static phase adjusting elements are used, then the manufacturing process is simple, but the efficiency and productivity in beam applications are reduced
Solution Approach 1:
The phase plate is pre-configured with multiple controllable regions or zones during manufacturing, each capable of being independently adjusted. This preliminary structuring allows for rapid reconfiguration during operation without requiring complex real-time manufacturing processes, thus improving productivity while keeping the manufacturing process relatively simple.
Solution Approach 2:
The invention replaces mechanical adjustment mechanisms (such as moving parts or physically reconfigurable structures) with field-based control (electrical, magnetic, or optical fields) that can dynamically adjust phase distribution. This substitution eliminates complex mechanical systems while enabling efficient and rapid beam manipulation, thereby improving productivity without significantly complicating the manufacturing process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides programmable and efficient beam manipulation, improving resolution, reducing beam damage, and enabling advanced imaging and lithography capabilities while offering a cost-effective and compact alternative to conventional lenses and phase plates.
Implementation Method 1
Each electrostatic phase adjusting element may comprise an electrode. At least one of the control lines may be adapted for controlling an electric potential of the electrode.
Implementation Method 2
The plurality of phase adjusting elements may comprise controllable magnetic elements, each controllable magnetic element being adapted for locally controlling a magnetic field to locally adjust the phase of the charged particle wave due to the Aharanov-Bohm effect.
Data Source
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AI summary
The invention relates to a device for (1) locally manipulating a spatial phase distribution of a charged particle wave propagating along a beam axis (Z). The device comprises a support element (2) having a target region for receiving the charged particle wave propagating along the beam axis (Z) and a plurality of phase adjusting elements (3), supported by the support element (2) and located in the target region, for locally adjusting the phase of the charged particle wave when the charged particle wave impinges on the phase adjusting element. The device also comprises a plurality of control lines (4) connected to the plurality of phase adjusting elements for individually controlling each phase adjusting element.