Pt Oxide Electrode Resistance Switching Device

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Solution Overview

Problem

Conventional resistance switching devices with a Pt/Nb:SrTiO3 structure require long pulse voltages for switching due to low response characteristics and experience decreased retention characteristics at high temperatures, limiting their use in next-generation non-volatile memory applications.

Innovation Solution

A resistance switching device with an n-type oxide semiconductor and electrodes forming a Schottky junction, where the first electrode has an oxygen-containing layer of gold or platinum oxide, improving resistance variation and response characteristics by facilitating easier oxygen exchange at the interface, even with short voltage pulses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If a Pt/Nb:SrTiO3 Schottky junction structure is used, then resistance variation phenomenon is achieved, but response characteristics are low requiring long pulse voltage

Engineering Contradiction:
Improveresponse characteristicsVSAvoidpulse voltage duration
Core Design Contradiction:
SpeedVSDuration of action of moving object

Solution Approach 1:

The invention changes the chemical state parameter of the Pt electrode by forming Pt oxide on its surface. This parameter change enables easier oxygen exchange between the electrode and semiconductor, reducing the pulse voltage duration from long to short while maintaining resistance switching functionality

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The Pt oxide layer acts as an intermediary substance between the Pt electrode and Nb:SrTiO3 semiconductor. It facilitates oxygen exchange by serving as an oxygen reservoir, enabling fast resistance switching without requiring long pulse voltages

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If a Pt/Nb:SrTiO3 Schottky junction structure is used, then resistance variation phenomenon is achieved, but retention characteristics are decreased at high temperature

Engineering Contradiction:
Improveretention characteristicsVSAvoidoperating temperature
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The invention changes the chemical composition parameter of the electrode interface by introducing Pt oxide. This modification stabilizes the Schottky junction at high temperatures, preventing degradation of retention characteristics that occurs with conventional Pt electrodes

Inventive Principle:
Principle #35Parameter changes

3Speed

If an oxygen-containing layer of Pt oxide is formed on the first electrode, then response characteristics are improved with short pulse switching, but device structure becomes more complex

Engineering Contradiction:
Improveswitching speedVSAvoidelectrode structure complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The Pt oxide layer is formed preliminarily on the Pt electrode surface before device operation. This preliminary oxidation creates the necessary oxygen exchange capability that enables fast switching, eliminating the need for complex control mechanisms during operation

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device achieves enhanced resistance variation ratio, response characteristics, and retention characteristics, enabling faster switching and improved memory performance, particularly at elevated temperatures.

Implementation Method 1

facilitating easier oxygen exchange at the interface

Methodology Applied
Scientific EffectOxygen exchange: Diffusion

Implementation Method 2

a Schottky junction which provides resistance variation/memory characteristics

Methodology Applied
Scientific EffectSchottky junction: Electrical Resistance

Data Source

PatentUS9496492B2Resistance switching device and process for producing thereof
Publication Date: 2016.11.15 MURATA MFG CO LTD
  • US9496492B2 patent drawing
  • US9496492B2 patent drawing
  • US9496492B2 patent drawing

AI summary

A resistance switching device having a high resistance variation ratio, an excellent response characteristic, an excellent resistance memory characteristic (retention characteristics) and an excellent repeat resistance. The resistance switching device comprises an n-type oxide semiconductor and first and second electrodes which are disposed so as to interpose at least a part of the n-type oxide semiconductor therebetween wherein a Schottky junction which provides resistance variation/memory characteristics by the application of voltage having different polarities between the first and second electrodes is formed at an interface between the n-type oxide semiconductor and the first electrode; and the first electrode is positioned such that it is in contact with the n-type oxide semiconductor, and has a lower layer which is formed from Au oxide or a Pt oxide or Au or Pt containing oxygen having the thickness of 1-50 nm.