Pulse Electromagnet Inner Tube Coating
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Solution Overview
Problem
Existing methods for coating the inner walls of long metal tubes are inefficient and difficult to apply, especially for tubes with small diameters, due to the challenges of inserting magnets and maintaining a magnetic field, which limits their commercialization and effectiveness.
Innovation Solution
A magnetron sputtering coating process using a pulse electromagnet outside the tube to generate a magnetic field and apply a synchronized negative high-voltage pulse to a sputtering target inside the tube, allowing for the coating of the entire inner surface while minimizing the size of the electromagnet and enabling movement to ensure uniform coverage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a permanent magnet is inserted into the metal tube to form a magnetic field for magnetron sputtering, then the coating process can be performed, but the permanent magnet cannot be easily inserted into the metal tube due to space constraints when the metal tube has a small internal diameter
Solution Approach 1:
The patent replaces the mechanical insertion of permanent magnets with an electromagnetic field generation system. A coil assembly generates a magnetic field that extends into the metal tube without requiring physical insertion of magnets into the tube, thereby solving the space constraint problem for small diameter tubes while enabling magnetron sputtering coating
Solution Approach 2:
The patent introduces a coil assembly as an intermediary device that generates the magnetic field externally. Instead of directly inserting magnets into the tube, the coil assembly acts as a mediator that creates the necessary magnetic field environment for magnetron sputtering without occupying space inside the tube
2Use of energy by moving object
If a pulse electromagnet is used to generate magnetic field, then power consumption and heat issues are reduced, but the electromagnet needs to be moved to ensure uniform coverage of the entire inner surface
Solution Approach 1:
The patent implements a movable pulse electromagnet system that can be positioned at different locations along the metal tube. The electromagnet is moved to different positions to ensure uniform magnetic field coverage across the entire inner surface, transforming the system from static to dynamic operation
Solution Approach 2:
The patent uses periodic pulsing of the electromagnet combined with periodic movement to different positions. The electromagnet operates in pulses at each position and then moves to the next position, creating a periodic action pattern that achieves uniform coverage while minimizing power consumption during movement
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively deposits a uniform coating on the inner walls of long metal tubes, including those with small diameters, by generating a strong magnetic field and plasma, enhancing durability and functionality while reducing power consumption and heat issues.
Implementation Method 1
a pulse electromagnet installed around an outside perimeter of the metal tube sample coaxially with the metal tube sample to apply a pulse magnetic field in an axial direction of the metal tube sample
Implementation Method 2
applying a negative high-voltage pulse synchronized with the pulse power applied to the pulse electromagnet to the sputtering target metal tube, thereby generating plasma around an inner wall of the metal tube
Data Source
AI summary
An apparatus and a method for coating an inner wall of a metal tube are provided. The apparatus for coating an inner wall of a metal tube includes mounting posts on which both end openings of a metal tube are mounted and configured to block the inside of the metal tube from the ambient air so that a pressure in the metal tube is adjustable by the vacuum exhaust and inflow of process gases, a sputtering target metal tube installed inside the metal tube coaxially with the metal tube, a pulse electromagnet installed around an outside perimeter of the metal tube coaxially with the metal tube to apply a pulse magnetic field in an axial direction of the metal tube, an electromagnetic pulse power supply unit configured to apply pulse power to the pulse electromagnet, and a sputtering pulse power supply unit configured to synchronize a negative high-voltage pulse with the pulse power applied to the pulse electromagnet and apply to the sputtering target metal tube.