Solid-State Imaging Device with Pupil-Corrected Waveguide Walls
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Solution Overview
Problem
In solid-state imaging devices where incident light is obliquely incident on the microlens, there is a possibility of light reflection and scattering by the waveguide wall part, leading to color mixture and reduced pixel sensitivity.
Innovation Solution
A solid-state imaging device with microlenses that condense light, color filters that transmit specific wavelengths, and waveguide wall parts arranged between color filters, with each waveguide wall part subjected to pupil correction to prevent light scattering and enhance pixel sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If waveguide wall parts are used to prevent light diffusion in color filters, then light guidance is improved, but light scattering and reflection occur when incident light is oblique, causing color mixture
Solution Approach 1:
The waveguide wall part is designed with different structures in different regions: in the first region (perpendicular to optical axis), it has a standard structure for light guidance, while in the second region (oblique to optical axis), it includes light scattering prevention structures such as inclined surfaces or gaps. This local differentiation allows the same component to perform multiple functions in different spatial zones.
Solution Approach 2:
The waveguide wall part is divided into multiple functional regions along the optical path. The first region handles normal light guidance perpendicular to the optical axis, while the second region specifically addresses oblique incident light by introducing scattering prevention structures. This segmentation allows targeted solutions for different light paths.
2Measurement precision
If waveguide wall parts are positioned to guide light, then pixel sensitivity is enhanced, but adjacent pixels may receive scattered light causing color mixture
Solution Approach 1:
The waveguide wall part implements different structural characteristics in different regions: the first region maintains standard waveguide properties for sensitivity enhancement, while the second region incorporates light scattering prevention structures (inclined surfaces, gaps, or reduced refractive index materials) specifically to prevent color mixture from oblique light.
Solution Approach 2:
The waveguide wall part acts as an intermediary structure between the color filter and adjacent pixels. By introducing light scattering prevention structures in the second region, it mediates the interaction between oblique incident light and adjacent pixels, preventing harmful light transfer while maintaining useful light guidance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device improves pixel sensitivity and prevents color mixture by guiding light effectively into the intended pixel, reducing light diffusion and scattering.
Implementation Method 1
a plurality of microlenses that condenses incident light
Implementation Method 2
a plurality of color filters that transmits light of a specific wavelength included in the condensed incident light
Implementation Method 3
a plurality of waveguide wall parts arranged between the color filters and surrounding the color filter
Implementation Method 4
a waveguide is formed with the color filter as the core and the separation part (waveguide wall part) as the cladding
Implementation Method 5
a plurality of photoelectric conversion parts on which light having a specific wavelength transmitted through the color filter is incident
Data Source
AI summary
Provided is a solid-state imaging device capable of enhancing pixel sensitivity and preventing color mixture. A solid-state imaging device includes: a plurality of microlenses that condenses incident light; a plurality of color filters that transmits light of a specific wavelength included in the condensed incident light; a plurality of photoelectric conversion parts on which light having a specific wavelength transmitted through the color filter is incident; and a plurality of waveguide wall parts arranged between the color filters and surrounding the color filter. Then, each of the plurality of waveguide wall parts is formed in a position subjected to pupil correction.


