Threaded Purge Connectors for Substrate Containers
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Solution Overview
Problem
Existing substrate container designs for semiconductor manufacturing lack efficient and maintainable connections for gas flow between the container shell and conveyor plate, which affects the precision and reliability of wafer transport and processing.
Innovation Solution
The implementation of threaded connectors with seals and removable, field-serviceable purge modules that allow for the integration of larger filters, reducing gas flow resistance and enabling precise control of gas flow into and out of the substrate container without altering its dimensions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If traditional welding or fixed connectors are used to join shell and plate, then structural strength is improved, but maintenance and servicing become difficult requiring entire container replacement
Solution Approach 1:
The connector is divided into separate modular components: a threaded rod portion, a purge module, and a nut assembly. This segmentation allows individual components to be serviced or replaced independently while maintaining the overall structural integrity of the substrate container, eliminating the need to replace the entire container for maintenance purposes.
2Device complexity
If small filters are used in fixed connectors, then device complexity is reduced, but gas flow resistance increases affecting purge efficiency
Solution Approach 1:
The purge module incorporates a threaded connection system that allows the filter component to be dynamically replaced or upgraded. This enables the use of larger diameter filters that reduce gas flow resistance while maintaining ease of installation and removal through the threaded interface, optimizing both flow efficiency and operational flexibility.
3Reliability
If the entire substrate container is replaced for component servicing, then reliability is maintained, but loss of time and resources increase significantly
Solution Approach 1:
The purge module is extracted as a separate, independently serviceable component from the main substrate container structure. This allows the purge module to be removed, serviced, or replaced without affecting the integrity or functionality of the container itself, dramatically reducing service time and resource consumption while maintaining system reliability.
4Ease of manufacture
If threaded connectors with seals are used, then ease of assembly is improved, but potential for leakage increases requiring precise sealing
Solution Approach 1:
A seal element is introduced as an intermediary component between the threaded connector portions. This seal mediator ensures reliable gas-tight sealing while allowing the threaded connection to maintain its ease of assembly and disassembly characteristics, resolving the contradiction between assembly simplicity and sealing reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution ensures a strong and precise connection between the substrate container shell and conveyor plate, allowing for efficient gas flow management while maintaining the container's dimensions, facilitating reliable wafer transport and processing, and enabling easy servicing of components without replacing the entire container.
Implementation Method 1
The seal may be compressed when a nut is tightened on the threaded connector to fix the plate and the shell to one another
Data Source
AI summary
A substrate container including a plate, a shell, a connector, and a seal, where the connector is threaded and secured via a nut, and the seal contacts each of the shell, plate, and connector. The plate has a recess accommodating an end of the connector and the nut. Field-serviceable, removable purge modules including check valves may be used with the substrate container, and may be secured to the substrate container in the recess in the plate. Filters may be secured to the connector or included in the purge modules. These filters may have diameters larger than an internal diameter of the connector.