Purge Gas Distribution Assembly for Uniform Substrate Container Flow
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Solution Overview
Problem
Existing substrate container systems face challenges in efficiently distributing purge gas, leading to potential contamination and reduced yield due to improper gas flow management during processing.
Innovation Solution
A purge flow distribution system that includes a purge module configured to filter and distribute purge gas into a substrate container through multiple points of introduction, allowing for improved purging operations by optimizing gas flow paths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If purge gas is introduced through a single diffuser location, then the purge assembly structure is simple, but the gas distribution uniformity and purging effectiveness are insufficient
Solution Approach 1:
The purge assembly is segmented into multiple functional components: a purge module with filter and check valve, a gas distributor with multiple outlets, and multiple diffusers positioned at different locations. This segmentation allows each component to perform its specific function while collectively achieving uniform gas distribution throughout the substrate container.
Solution Approach 2:
Different parts of the purge system are designed with different properties: the purge module provides filtration and flow control, the gas distributor provides multiple distribution points, and diffusers provide localized gas release. Each component has optimized local characteristics to achieve overall uniform gas distribution while maintaining structural functionality.
2Manufacturing precision
If diffusers are installed inside the substrate container, then the gas distribution coverage is improved, but particle generation during installation increases
Solution Approach 1:
The purge module, gas distributor, and diffusers are pre-assembled into a complete purge assembly outside the substrate container. This preliminary assembly allows all installation activities to be completed in a controlled environment, preventing particle generation inside the container and eliminating the need for internal installation operations.
Solution Approach 2:
Multiple components (purge module, gas distributor, and multiple diffusers) are merged into a single integrated purge assembly that can be installed as one unit. This combination maintains comprehensive gas distribution coverage while simplifying installation to a single external operation, preventing particle contamination.
3Manufacturing precision
If multiple components are assembled inside the substrate container, then the purge gas distribution is optimized, but the installation complexity and contamination risk increase
Solution Approach 1:
All purge assembly components are pre-assembled outside the substrate container, completing the complex multi-component assembly process before installation. This preliminary action optimizes purge gas distribution while eliminating the complexity of internal assembly operations and associated contamination risks.
Solution Approach 2:
The purge module is nested within the gas distributor, which in turn is integrated with multiple diffusers to form a compact purge assembly. This nested structure allows multiple components to be combined in a space-efficient manner that maintains optimized gas distribution while enabling installation as a single unit.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enhances the distribution of purge gas within substrate containers, reducing contamination risks and improving processing yields by ensuring optimal gas flow and reduced particle generation during installation.
Implementation Method 1
a purge module configured to filter and distribute a stream of purge gas
Data Source
AI summary
A method and purge gas assembly for supplying or distributing flow of purge gas into a substrate container is provided. The purge gas assembly includes a gas distributor comprising at least one outlet and a purge module comprising an inlet for receiving a flow of purge gas, a check valve, and an outlet. A combination of the gas distributor and purge module form a chamber. The chamber is configured to supply the purge gas to the at least one outlet of the gas distributor.