Quantum Dot Lasers Bonded to Silicon Substrates

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Solution Overview

Problem

The integration of Quantum Dot lasers onto Si photonic platforms is cost-ineffective due to the use of larger wafers with a small ratio of III-V semiconductor material, leading to yield losses and challenges in strain management, thermal conductivity, and limited operating temperature ranges compared to InP-based lasers.

Innovation Solution

Growing Quantum Dot lasers on a thin film of III-V semiconductor material bonded with a Si substrate, using epitaxial growth processes to form a quantum dot layer aligned with a waveguide, and integrating photonic elements for improved physical properties and manufacturing ease.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If Quantum Dot lasers are grown on a thin film of III-V semiconductor material bonded with a Si substrate, then manufacturing precision and production yield are improved, but the complexity of the fabrication process increases

Engineering Contradiction:
Improveproduction yieldVSAvoidfabrication process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The fabrication process is divided into separate stages: first bonding the III-V semiconductor film to the Si substrate, then performing epitaxial growth of the quantum dot layer, and finally integrating photonic elements. This segmentation allows each step to be optimized independently, improving overall manufacturing precision and yield despite the increased number of steps.

Inventive Principle:
Principle #1Segmentation

2Ease of manufacture

If InP-based lasers are used, then ease of manufacture is improved, but thermal conductivity and operating temperature range are worsened

Engineering Contradiction:
Improvemanufacturing easeVSAvoidoperating temperature range
Core Design Contradiction:
Ease of manufactureVSTemperature

Solution Approach 1:

The patent creates a composite structure by bonding III-V semiconductor material (which has good laser properties) to a silicon substrate (which provides superior thermal conductivity). This composite approach allows the laser to benefit from both the ease of manufacturing InP-based lasers and the improved thermal management of silicon, expanding the operating temperature range.

Inventive Principle:
Principle #40Composite materials

3Productivity

If larger wafers are used for laser production, then productivity is improved, but yield losses increase due to small ratio of III-V semiconductor material

Engineering Contradiction:
Improveproduction volumeVSAvoidyield losses
Core Design Contradiction:
ProductivityVSLoss of substance

Solution Approach 1:

The patent uses thin films of III-V semiconductor material bonded to larger silicon substrates. This thin-film approach allows much larger area to be utilized compared to traditional bulk III-V wafers, enabling higher productivity while minimizing material loss since only a thin layer of the expensive III-V material is required to cover the entire large substrate area.

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in lasers with superior physical properties and greater production yields, overcoming the limitations of InP-based lasers, such as improved thermal conductivity and expanded operating temperature ranges.

Implementation Method 1

at least one layer grown epitaxially from the base layer, wherein the at least one layer comprises a quantum dot layer

Methodology Applied
Scientific EffectEpitaxial growth: Epitaxy

Data Source

PatentUS10734785B2Silicon photonics co-integrated with quantum dot lasers on silicon
Publication Date: 2020.08.04 CISCO TECHNOLOGY INC
  • US10734785B2 patent drawing
  • US10734785B2 patent drawing
  • US10734785B2 patent drawing

AI summary

An apparatus, comprising: a silicon substrate; and a quantum dot laser comprising: a base layer of a III-V semiconductor material, bonded with the silicon substrate; and at least one layer grown epitaxially from the base layer, wherein the at least one layer comprises a quantum dot layer. The apparatus further comprises a photonic element, fabricated on the silicon substrate and including a waveguide optically aligned with the quantum dot layer.