Quantum Dot Readout Gate Layout for Parasitic Capacitance Isolation

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Solution Overview

Problem

Existing quantum dot devices face challenges in accurately reading out the spin or charge state due to capacitive coupling between the RF reservoir and the accumulation gate, which complicates the read-out process.

Innovation Solution

A semiconductor element with a second accumulation gate electrode is introduced, allowing for the formation of a further two-dimensional charge carrier gas in a second area near the first area. This additional gate is electrically isolated from the first accumulation gate, enabling independent control of electron density and resistivity in the second area, thereby preventing parasitic capacitance and enhancing read-out accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single accumulation gate is used to form the 2D electron gas, then the device structure is simple, but parasitic capacitance between the RF reservoir and accumulation gate complicates the read-out process

Engineering Contradiction:
Improvegate structureVSAvoidspin state read-out accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The single accumulation gate is segmented into two separate accumulation gates (first and second accumulation gates) that are electrically isolated from each other. This segmentation allows independent control of the RF reservoir region and the spin qubit region, eliminating parasitic capacitance between the RF reservoir and accumulation gate while maintaining the ability to form and control the 2D electron gas for both functions

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The first accumulation gate acts as an intermediary element that couples the RF reservoir to the quantum dot device. By introducing this intermediate gate structure with independent voltage control, the patent enables RF signal application to the spin qubit while preventing direct parasitic capacitive coupling between the RF reservoir and the spin qubit region, thus improving measurement precision

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of operation

If the accumulation gate is directly coupled to the RF reservoir, then the read-out process is straightforward, but parasitic channels increase and reduce read-out accuracy

Engineering Contradiction:
Improveread-out processVSAvoidread-out accuracy
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The accumulation gate system is segmented into electrically isolated first and second accumulation gates, creating distinct functional regions. The first accumulation gate handles RF reservoir coupling while the second handles spin qubit control, preventing parasitic current channels and improving read-out reliability through independent voltage control of each segment

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The parasitic capacitance effect is extracted and eliminated by introducing the electrically isolated first accumulation gate between the RF reservoir and the quantum dot device. This extraction removes the harmful parasitic coupling while maintaining the necessary RF signal transmission path, thereby improving read-out accuracy

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The introduction of the second accumulation gate electrode improves the accuracy of spin or charge state read-out by isolating the 2D electron gas from the Ohmic contact, reducing parasitic channels, and allowing for independent control of electron density, thus enhancing the reliability of RF reflectometry in silicon-based quantum dot devices.

Implementation Method 1

a first accumulation gate electrode located opposite the quantum well layer and spaced apart therefrom at least by the semiconductor functional layer for enabling to form a two dimensional charge carrier gas in a first area of the quantum well layer upon applying a first biasing voltage to the first accumulation gate electrode

Methodology Applied
Scientific EffectElectrical field effect: Electric Field

Implementation Method 2

applying, using a radio frequency reflectometer circuit, a radio frequency signal to the accumulation gate of the quantum dot device; and analyzing a reflected part of the radio frequency signal such as to determine the spin state of the quantum dot device

Methodology Applied
Scientific EffectRadio frequency reflection: Reflection

Data Source

PatentUS12289912B2Semiconductor element, method of reading out a quantum dot device and system
Publication Date: 2025.04.29 NEDERLANDSE ORG VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
  • US12289912B2 patent drawing
  • US12289912B2 patent drawing
  • US12289912B2 patent drawing

AI summary

Semiconductor element, method of reading out a quantum dot device and system. The present document relates to a semiconductor element for providing a source reservoir for a charge sensor of a quantum dot device. The element comprises a semiconductor heterostructure (2, 3, 5) including a quantum well layer (5) contiguous to a semiconductor functional layer (3), one or more ohmic contacts (9) for providing charge carriers, and a first accumulation gate electrode (13) located opposite the quantum well layer and spaced apart therefrom at least by the semiconductor functional layer for enabling to form a two dimensional charge carrier gas (14) in a first area of the quantum well layer upon applying a first biasing voltage to the first accumulation gate electrode. The device further comprises a second accumulation gate electrode (17) opposite the quantum well layer and electrically isolated from the first accumulation gate electrode (13), the second accumulation gate electrode enabling to be biased with a second biasing voltage, for enabling to extend the two dimensional charge carrier gas in a second area (18) contiguous to the first area. This document further relates to a method of determining a spin state in a quantum dot device, as well as a system comprising a quantum dot device and a semiconductor element.