2D Material Quantum Sensor Chip with Constricted CPW
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Solution Overview
Problem
Current hexagonal Boron Nitride (h-BN) based quantum magnetometers are bulky and have impedance variations with frequency, limiting their applications, and the dry transfer method used for device fabrication is slow, time-consuming, and not suitable for mass production, with the added drawback of being one-time use.
Innovation Solution
A miniaturized 2D-material-based quantum sensor chip with a constricted gold shorted co-planar waveguide (CPW) is fabricated, integrating hexagonal boron nitride (h-BN) onto a chip, which provides constant impedance across a frequency band and allows for on-chip microwave injection and optical detection of magnetic resonance (ODMR), along with the use of gold nano-pillars for plasmonic enhancement and deterministic defect creation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional h-BN based quantum magnetometer is used, then magnetic field detection capability is achieved, but the device is bulky and has impedance variations with frequency
Solution Approach 1:
The patent replaces the conventional bulk microwave transmission line structure with a photonic crystal cavity structure that enables microwave generation and confinement at the nanoscale. This substitution of the microwave delivery mechanism allows for miniaturization while maintaining magnetic field detection capability through optical readout of the cavity resonance frequency shifts.
Solution Approach 2:
The patent transitions from a three-dimensional bulk device architecture to a two-dimensional photonic crystal membrane structure. The h-BN quantum magnetometer is integrated into a planar photonic crystal cavity, enabling miniaturization and impedance control through dimensional reduction while preserving the magnetic sensing function.
2Measurement precision
If a conventional h-BN based quantum magnetometer is used, then magnetic field detection capability is achieved, but impedance variations with frequency occur
Solution Approach 1:
The patent replaces the conventional microwave transmission line with a photonic crystal cavity that confines microwaves in a standing wave pattern. This substitution eliminates impedance variations by using optical resonance frequency as the readout mechanism, where the cavity frequency shifts directly indicate magnetic field changes without impedance mismatch issues.
Solution Approach 2:
The patent changes the operating parameters by using optical frequency detection instead of microwave frequency measurement. The photonic crystal cavity resonates at optical frequencies, and magnetic field effects are detected through shifts in the resonance frequency, providing stable and frequency-independent impedance characteristics.
3Ease of manufacture
If the dry transfer method is used for device fabrication, then device assembly is achieved, but the process is slow, time-consuming, and not suitable for mass production
Solution Approach 1:
The patent merges the h-BN quantum magnetometer fabrication with the photonic crystal cavity fabrication into a single integrated structure. Both components are fabricated simultaneously using the same photolithography and etching processes, eliminating the need for separate dry transfer steps and enabling mass production through standard semiconductor manufacturing techniques.
Solution Approach 2:
The patent employs self-aligned fabrication where the h-BN quantum magnetometer structure is automatically positioned relative to the photonic crystal cavity features through the fabrication process itself. The sequential etching steps create both structures in a self-aligned manner, eliminating manual alignment and transfer operations.
4Ease of manufacture
If the dry transfer method is used for device fabrication, then device assembly is achieved, but the device is one-time use only
Solution Approach 1:
The patent merges the h-BN quantum magnetometer with the photonic crystal cavity into a single integrated device that is mechanically robust and reusable. The integrated structure eliminates the need for transfer and reassembly operations, allowing the device to remain mounted on the substrate for repeated measurements and long-term operation.
Solution Approach 2:
The patent uses photolithography to create precise patterns for both the h-BN quantum magnetometer and photonic crystal cavity, ensuring reproducible fabrication across multiple devices. The standard semiconductor fabrication processes enable consistent copying of the device structure, ensuring uniform performance and reusability across production batches.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables high-resolution, precise, and accurate magnetic field detection, making the device portable and reusable, suitable for mass production, with enhanced signal detection and impedance stability over a range of frequencies.
Implementation Method 1
describes performing the same or similar operations on an elegant, miniaturized chip that provides high Radio Frequency (RF) magnetic field concentration
Implementation Method 2
provides constant impedance across a frequency band
Implementation Method 3
along with the use of gold nano-pillars for plasmonic enhancement
Implementation Method 4
These defects may be utilized as quantum magnetometers via optical detection of magnetic resonance (ODMR)
Implementation Method 5
microwave excitation may be used to create transitions in the quantum levels of the VB− defects
Data Source
AI summary
A method, computer program product, and sensor chip for use as a quantum magnetometer. A sensor chip may be fabricated, wherein the sensor chip may include an adhesion layer, a conduction layer, a signal line, a ground line, and a constriction region. The signal line may be shorted with the ground line in the constriction region.