Quantum Well Band Discontinuity Engineering for Dopant Activation

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Solution Overview

Problem

Controlling doping in wide band gap semiconductor materials, such as Aluminum Gallium Nitride, is challenging due to deep impurity levels and inefficient activation, limiting the conductivity of p-type devices like deep ultraviolet light emitting diodes.

Innovation Solution

A structure is fabricated with a quantum well and an adjacent barrier, where the target band discontinuity is aligned with the dopant's activation energy, allowing for efficient real space transfer of holes by aligning the dopant energy level with the valence energy band edge of the quantum well, reducing activation energy and enhancing conductivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If doping is performed in wide band gap semiconductor materials, then conductivity is intended to be improved, but impurity activation is inefficient due to deep impurity levels

Engineering Contradiction:
ImproveconductivityVSAvoiddopant activation efficiency
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent changes the energy parameter alignment between the dopant level and valence band edge by engineering the band discontinuity of adjacent quantum wells and barriers. Specifically, the quantum well band edge is positioned to coincide with the dopant energy level in the barrier, creating a resonant condition that enhances hole transfer efficiency and effectively increases dopant activation without changing the doping process itself.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the band discontinuity between quantum well and barrier is large, then carrier confinement is improved, but dopant activation becomes more difficult

Engineering Contradiction:
Improvecarrier confinementVSAvoiddopant activation
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent applies local quality by creating different band structure configurations in different regions: the quantum well provides strong carrier confinement through its band structure, while the barrier region is engineered with a specific band discontinuity that aligns the dopant level with the quantum well valence band edge. This localized energy level alignment in the barrier region enables efficient hole transfer and dopant activation without compromising the overall carrier confinement provided by the quantum well structure.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in improved dopant activation and increased conductivity in semiconductor devices by facilitating efficient real space transfer of holes, addressing the limitations of existing technologies in controlling doping in wide band gap materials.

Implementation Method 1

allowing for efficient real space transfer of holes by aligning the dopant energy level with the valence energy band edge of the quantum well

Methodology Applied
Scientific EffectReal space transfer:

Data Source

PatentEP2507820B1Semiconductor material doping
Publication Date: 2016.06.01 SENSOR ELECTRONIC TECHNOLOGY INC
  • EP2507820B1 patent drawingFigure 1
  • EP2507820B1 patent drawingFigure 2
  • EP2507820B1 patent drawingFigure 3A~3B

AI summary

A solution for designing and/or fabricating a structure including a quantum well and an adjacent barrier is provided. A target band discontinuity between the quantum well and the adjacent barrier is selected to coincide with an activation energy of a dopant for the quantum well and/or barrier. For example, a target valence band discontinuity can be selected such that a dopant energy level of a dopant in the adjacent barrier coincides with a valence energy band edge for the quantum well and/or a ground state energy for free carriers in a valence energy band for the quantum well. The quantum well and the adjacent barrier can be formed such that the actual band discontinuity corresponds to the target band discontinuity.