Synthetic Quartz Glass Cavity Structure for UV-LED Package Reliability
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Solution Overview
Problem
Existing methods for manufacturing synthetic quartz glass cavity members and optical device packages face challenges in achieving precise dimensional accuracy, heat resistance, and UV resistance, particularly when using short wavelength UV-LEDs, due to limitations in etching techniques and bonding methods, which affect the long-term reliability and efficiency of the devices.
Innovation Solution
A synthetic quartz glass cavity member with a mirror surface and a rough surface is developed, along with a manufacturing method involving drilling and bonding techniques using a metal-base adhesive layer to create a cavity structure that enhances heat and UV resistance, allowing for improved light extraction efficiency and stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If etching method is used to form cavity structure, then cavity opening can be formed, but dimensional accuracy deteriorates due to rounded opening
Solution Approach 1:
The patent replaces the chemical etching process with a mechanical drilling process to form the cavity opening. This substitution eliminates the rounded opening problem inherent in etching while achieving precise dimensional control through mechanical means.
Solution Approach 2:
The patent changes the processing method from chemical etching to mechanical drilling, fundamentally altering the parameter of how the cavity opening is formed. This enables precise control over opening dimensions and shape, directly addressing the dimensional accuracy issue.
2Strength
If anodic bonding is used to bond glass members, then bonding can be achieved, but it cannot be employed for synthetic quartz glass which is amorphous high-purity SiO2
Solution Approach 1:
The patent changes the bonding method from anodic bonding (which requires crystalline structure) to a different bonding approach suitable for amorphous synthetic quartz glass. This parameter change in bonding methodology enables versatility across different glass types while maintaining bonding strength.
3Length of stationary object
If dry etching is used to drill deep recesses, then deep cavity can be formed, but processing time and cost increase
Solution Approach 1:
The patent replaces dry etching with a mechanical drilling process to form deep recesses. This substitution achieves the desired cavity depth while significantly reducing processing time and cost associated with prolonged etching operations.
4Reliability
If conventional packaging is used for short wavelength UV-LED, then device can be packaged, but heat resistance and UV resistance are insufficient for long-term reliability
Solution Approach 1:
The patent employs synthetic quartz glass as the cavity material, which provides both superior heat resistance and UV resistance compared to conventional packaging materials. This material selection creates a composite structure that protects the UV-LED from thermal and UV degradation, ensuring long-term reliability.
Data Source
AI summary
A synthetic quartz glass cavity member (1) is bonded to a substrate (6) having an optical device (7) mounted thereon such that the device may be accommodated in the cavity member. The cavity member (1) has an inside surface consisting of a top surface (2a) opposed to the device (7) and a side surface (3a). The top surface (2a) is a mirror surface and the side surface (3a) is a rough surface.