Quartz Glass Cavity Package With Mirror-Rough Surfaces for UV Reliability
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Solution Overview
Problem
Existing methods for manufacturing synthetic quartz glass cavity members and optical device packages face challenges in achieving precise dimensional accuracy and stress-free bonding, particularly when using high-purity SiO2 materials, and are prone to degradation and breakage under short-wavelength light and heat exposure.
Innovation Solution
A synthetic quartz glass cavity member with a mirror surface and rough surface structure is bonded to a substrate using a metal-base adhesive layer, formed by drilling through-holes in a quartz glass substrate and applying a metal-base paste, which is then heated to create a B-staged adhesive layer for improved bonding and heat resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If etching method is used to form cavity structure, then cavity opening can be formed, but dimensional accuracy deteriorates due to rounding of opening
Solution Approach 1:
The patent replaces the chemical etching process with a mechanical drilling process to form the cavity opening. This substitution eliminates the rounding effect inherent in etching and achieves precise dimensional control of the cavity opening, directly resolving the contradiction between manufacturability and shape accuracy.
2Strength
If anodic bonding is used to bond glass members, then bonding can be achieved, but it cannot be employed with synthetic quartz glass
Solution Approach 1:
The patent changes the bonding parameters by using eutectic bonding at lower temperatures (around 400-500°C) instead of anodic bonding. This parameter change enables successful bonding of synthetic quartz glass, which is incompatible with traditional anodic bonding methods, thereby resolving the contradiction between bonding strength and material adaptability.
3Strength
If organic adhesives are used for bonding, then bonding can be achieved, but heat resistance deteriorates
Solution Approach 1:
The patent uses eutectic bonding, which creates a composite bonding interface with metal intermetallic compounds formed at the bonding surface. This composite structure provides both strong bonding capability and excellent heat resistance, resolving the contradiction between bonding strength and temperature resistance that plagues organic adhesive systems.
4Length of stationary object
If dry etching is used to drill deep recesses, then deep cavity can be formed, but processing time and cost increase
Solution Approach 1:
The patent replaces the time-consuming dry etching process with a mechanical drilling process that can rapidly create deep cavity structures. This mechanical approach significantly reduces processing time and cost while achieving the required cavity depth, resolving the contradiction between cavity depth and manufacturing efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the long-term reliability and UV resistance of optical device packages by reducing stress and degradation, allowing for efficient light extraction and maintaining structural integrity under heat and UV exposure.
Implementation Method 1
applying a metal-base paste, which is then heated to create a B-staged adhesive layer for improved bonding
Data Source
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AI summary
A synthetic quartz glass cavity member (1) is bonded to a substrate (6) having an optical device (7) mounted thereon such that the device may be accommodated in the cavity member. The cavity member (1) has an inside surface consisting of a top surface (2a) opposed to the device (7) and a side surface (3a). The top surface (2a) is a mirror surface and the side surface (3a) is a rough surface.