Large-Size Synthetic Quartz Glass Substrate Flatness Correction
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Solution Overview
Problem
Existing methods for producing large-size synthetic quartz glass substrates face challenges in correcting flatness and parallelism within a short time, especially as substrate size increases, due to decreased reaction force and prolonged processing times.
Innovation Solution
A method involving the use of two working tools of different sizes to measure and correct the flatness and parallelism of large-size synthetic quartz glass substrates, where the first tool has a diameter corresponding to 15 to 50% of the substrate's diagonal length and the second tool has a smaller diameter, minimizing surface streaks and efficiently removing raised portions and thick portions based on measured data.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a conventional single working tool with small diameter is used for abrasive working, then the device complexity is reduced, but surface streaks are produced on the substrate surface
Solution Approach 1:
The patent divides the abrasive working process into multiple stages using two different working tools: a first working tool with larger diameter for initial abrasive working and a second working tool with smaller diameter for finishing. This segmentation allows each tool to perform its specialized function optimally, where the larger tool removes material efficiently and the smaller tool eliminates streaks without requiring a single complex multi-functional tool.
2Productivity
If a single large working tool is used to cover the entire substrate, then the processing time is reduced, but the reaction force decreases considerably leading to reduced ability to remove moderate irregularities
Solution Approach 1:
The patent segments the working process into two sequential steps using tools of different sizes. The first working tool with larger diameter applies sufficient reaction force to remove moderate irregularities from raised portions, while the second working tool with smaller diameter performs finishing work. This segmentation maintains effective force application throughout the process while completing the entire substrate processing efficiently.
3Manufacturing precision
If measurement and partial removal of raised portions is performed based on measured data, then the manufacturing precision is improved, but the processing time is prolonged
Solution Approach 1:
The patent performs preliminary measurement of flatness and parallelism to identify raised portions and thick portions before beginning the abrasive working process. Based on this preliminary data, the first working tool is used to remove the identified irregularities in a targeted manner, and then the second working tool performs finishing work. This preliminary action enables precise correction while minimizing unnecessary processing time by focusing removal only where needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively corrects flatness and parallelism of large-size synthetic quartz glass substrates within a short time, producing substrates with high flatness and parallelism, reducing processing time by a quarter compared to using a single larger tool.
Implementation Method 1
abrasive working by a first working tool having a diameter corresponding to 15 to 50% of the substrate diagonal length, and abrasive working by a second working tool having a smaller diameter than the first working tool
Data Source
AI summary
A large-size synthetic quartz glass substrate is produced by measuring a flatness and parallelism of front and back surfaces of a synthetic quartz glass substrate stock having a diagonal length of at least 1,000 mm, and partially removing raised portions and thick portions of the substrate stock on the basis of the measured data of flatness and parallelism. The removing step includes abrasive working by a first working tool having a diameter of 15-50% of the diagonal length, and abrasive working by a second working tool having a smaller diameter.