Quartz Susceptor Reflector Gap for Thermal Expansion
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Solution Overview
Problem
In semiconductor manufacturing, the susceptor made of quartz can be damaged due to thermal expansion of the reflector, which deforms and adheres to the susceptor, leading to inefficient heating and potential damage from stress during vacuum processing.
Innovation Solution
A substrate support system with a quartz susceptor, a metal reflector, and a thermocompression bonding process where the upper susceptor surface facing the reflector is roughened to prevent adhesion, and the reflector is accommodated in a recessed area of the lower susceptor, reducing the risk of damage from thermal expansion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If a reflector is placed under the heater to reflect radiant heat, then power consumption of the heater is reduced, but the reflector deforms due to thermal expansion and contacts the susceptor, causing damage
Solution Approach 1:
A gap is pre-formed between the reflector and the susceptor before thermal expansion occurs. This gap is created by positioning the reflector above the susceptor surface at room temperature, allowing thermal expansion to occur without contact and preventing adhesion damage to the susceptor
Solution Approach 2:
A support structure acts as an intermediary between the reflector and the susceptor. The support holds the reflector at a predetermined distance, mediating the thermal expansion process and preventing direct contact that would cause susceptor damage
2Productivity
If the reflector is positioned close to the susceptor to improve heat reflection efficiency, then heating efficiency is improved, but thermal expansion causes the reflector to contact and damage the susceptor
Solution Approach 1:
The reflector is pre-positioned at an optimal distance from the susceptor surface before heating begins. This preliminary positioning ensures both efficient heat reflection and sufficient clearance for thermal expansion, resolving the contradiction between heating efficiency and damage prevention
3Stability of the object's composition
If the susceptor is made thin to reduce weight and improve heating uniformity, then heating uniformity is improved, but the susceptor becomes more vulnerable to damage from reflector contact
Solution Approach 1:
The gap is established before heating, preventing reflector contact that would cause stress concentration on thin susceptors. This allows the use of thinner susceptors for improved heating uniformity without compromising strength, as the prevent contact mechanism eliminates the primary damage source
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration prevents damage to the susceptor by minimizing adhesion during thermocompression bonding and maintains efficient heat reflection, ensuring uniform heating and structural integrity during vacuum processing.
Implementation Method 1
a reflector reflecting heat and made of a metal
Implementation Method 2
the reflector deformed by thermal expansion may contact the susceptor made of quartz
Data Source
AI summary
Described herein is a technique capable of preventing a susceptor made of quartz from being damaged by contacting a reflector deformed by thermal expansion. A substrate support according to the technique may include an upper susceptor made of quartz; a lower susceptor made of quartz; and a reflector reflecting heat and made of a metal in a planar shape. A lower surface of the upper susceptor is bonded with an upper surface of the lower susceptor such that the reflector is interposed therebetween, a first recess accommodating the reflector is provided at the upper surface of the lower susceptor, and a portion of the lower surface of the upper susceptor facing the first recess is roughened.