Radiation Count Controller for False Count Mitigation

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Solution Overview

Problem

Inspection systems face false counts due to radiation-induced noise from sources like cosmic radiation and radioactive isotopes, which are not effectively mitigated by existing technologies, especially with the increased sensitivity of multi-pixel detectors.

Innovation Solution

An inspection system with a radiation count controller and sensors that detect particle radiation, coupled with an illumination sensor, identifies coincidence events between radiation and illumination detection events to refine feature identification and reduce false counts.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If multi-pixel detectors with increased conversion gain and lower noise readout electronics are used, then measurement precision is improved, but sensitivity to particle radiation increases causing more false counts

Engineering Contradiction:
Improvesignal detection precisionVSAvoidradiation-induced false counts
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The detector system is segmented into multiple independent pixel detectors, each capable of detecting both illumination photons and radiation particles. By segmenting the detection function across multiple pixels, the system can identify false counts through spatial and temporal correlation analysis between adjacent pixels, thereby maintaining high measurement precision while reducing radiation-induced errors.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A coincidence detection mechanism serves as an intermediary between the multiple pixel detectors. This intermediary component analyzes timing correlations and spatial patterns of detection events across pixels, identifying and filtering out radiation-induced false counts while preserving valid illumination signals, thus resolving the contradiction between sensitivity and false count rate.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If detector sensitivity is increased to detect weaker illumination signals, then measurement precision improves, but the detector becomes more susceptible to radiation noise

Engineering Contradiction:
Improveillumination signal detection precisionVSAvoiddetection accuracy under radiation
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

Multiple pixel detector signals are merged and analyzed together through coincidence detection logic. By combining information from multiple detectors and analyzing their temporal-spatial correlation, the system can distinguish between genuine illumination signals and random radiation events, thereby maintaining high measurement precision and reliability simultaneously.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The system implements feedback through real-time analysis of detection event patterns across multiple pixels. By continuously monitoring coincidence rates and temporal correlations, the system can dynamically adjust its signal processing to compensate for radiation-induced false counts, maintaining reliable detection accuracy even at high sensitivity settings.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively mitigates radiation-induced false counts by distinguishing between valid and false signals, improving the accuracy of feature detection in inspection systems.

Implementation Method 1

one or more radiation sensors for the detection of particle radiation

Methodology Applied
Scientific EffectIonization: Ionisation

Implementation Method 2

an illumination sensor oriented to detect illumination from a sample

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS10241217B2System and method for reducing radiation-induced false counts in an inspection system
Publication Date: 2019.03.26 KLA CORP
  • US10241217B2 patent drawing
  • US10241217B2 patent drawing
  • US10241217B2 patent drawing

AI summary

An inspection system with radiation-induced false count mitigation includes a radiation count controller coupled to one or more radiation sensors positioned proximate to an illumination sensor oriented to detect illumination from a sample. The radiation count controller may identify a set of radiation detection events based on radiation signals received from the radiation sensors during operation of the illumination sensor. The inspection system may further include an inspection controller to identify a set of illumination detection events based on an illumination signal, identify one or more features on the sample based on the set of illumination detection events, receive the set of radiation detection events from the radiation count controller, compare the set of radiation detection events to the set of illumination detection events to identify a set of coincidence events, and refine the one or more identified features on the sample based on the set of coincidence events.