Radiation Thermometer Calibration for CMP Downtime Reduction

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Solution Overview

Problem

Conventional radiation thermometer calibration in CMP polishing apparatuses is labor-intensive, requires downtime, and is prone to variations due to operator skill levels, making periodic calibration challenging and inaccurate.

Innovation Solution

A method and system for automatically calibrating radiation thermometers using a controller and heating devices with measurement bodies, which heat to target temperatures to calculate and correct temperature deviations, ensuring output values fall within a preset reference range, thereby reducing operator burden and downtime.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional manual calibration method is used, then calibration can be performed, but it requires significant operator time and skill, leading to labor-intensive operations and potential accuracy variations

Engineering Contradiction:

Improvecalibration accuracyVSAvoidoperator burden

Core Design Contradiction:

Measurement precisionVSEase of operation

Solution Approach 1:

The radiation thermometer performs self-calibration by comparing its own measurements with a reference thermometer during a calibration process that is initiated and controlled automatically by the controller, eliminating the need for continuous operator intervention and manual adjustments

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The manual calibration process is replaced with an automated electronic control system that automatically controls the heating device, coordinates the reference thermometer measurements, and adjusts the radiation thermometer calibration parameters through electronic communication between the controller and the thermometers

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If conventional calibration is performed, then radiation thermometer accuracy can be maintained, but the polishing apparatus must be stopped, causing production downtime

Engineering Contradiction:

Improvetemperature measurement accuracyVSAvoidapparatus availability

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

The calibration process is designed to be performed quickly by pre-positioning the reference thermometer and heating device in the correct locations before calibration is needed, and by having the controller automatically execute the calibration sequence, reducing the time the apparatus must be stopped

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The calibration process is integrated into the operational workflow of the polishing apparatus, allowing calibration to be performed with minimal disruption to the continuous polishing operation, thereby maintaining productivity while ensuring measurement accuracy

Inventive Principle:

Principle #20Continuity of useful action

3Measurement precision

If periodic calibration is implemented, then measurement accuracy is maintained, but the frequency and complexity of calibration operations increase

Engineering Contradiction:

Improvetemperature measurement accuracyVSAvoidcalibration system complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The controller serves multiple functions: it controls the polishing apparatus operation, monitors temperature measurements from the radiation thermometer, and performs calibration by coordinating with the reference thermometer and heating device, thereby simplifying the overall system architecture despite the periodic calibration requirements

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The automatic calibration process ensures accurate and efficient maintenance of radiation thermometer accuracy, maintaining consistent polishing rates and preventing substrate abnormalities, while reducing the need for frequent operator intervention and apparatus downtime.

Implementation Method 1

a heating device (61), on which a measurement body (68) is mounted, is placed below the radiation thermometer (48)

Methodology Applied

Scientific EffectHeating: Heating

Implementation Method 2

a radiation thermometer (48) for measuring a surface temperature of the polishing pad (3)

Methodology Applied

Scientific EffectThermal radiation: Thermal Radiation

Data Source

PatentUS12181345B2Method of calibrating radiation thermometer and system thereof

Publication Date: 2024.12.31 EBARA CORP

AI summary

The present invention relates to a method and a system of automatically calibrating a radiation thermometer disposed in a polishing apparatus. This method includes: placing a heating device (61), to which a measurement body (68) is attached, below the radiation thermometer (48); and using a controller (40) of the polishing apparatus coupled to the heating device (61) to heat a temperature of the measurement body (68) to a plurality of target temperatures (Ta), to measure the temperatures of the measurement body (68) at each target temperature (Ta) with the radiation thermometer (48), to calculate temperature deviation amounts which are differences between each of the target temperatures (Ta) and temperature output values of the radiation thermometer (48) corresponding to each target temperature (Ta), and to calibrate the radiation thermometer (48) so that all the temperature deviation amounts are within a preset reference range.