Standard Cell Rail-Over-Active Layout for Low-Resistance ICs

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Solution Overview

Problem

The miniaturization of integrated circuits (ICs) has led to stricter design and manufacturing specifications, as well as reliability challenges, particularly in generating and optimizing standard cell layout designs that meet these requirements while ensuring efficient power supply and reduced resistance.

Innovation Solution

The proposed solution involves a specific layout design for IC structures that include larger active regions for improved speed performance and power efficiency, with a unique arrangement of rails and gate structures to optimize voltage supply and reduce resistance, utilizing shallow trench isolation and fin layout patterns to enhance performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the IC size is miniaturized, then power consumption is reduced and functionality is increased, but manufacturing precision requirements become stricter and reliability challenges increase

Engineering Contradiction:
ImproveIC sizeVSAvoiddesign and manufacturing specifications
Core Design Contradiction:
Volume of moving objectVSManufacturing precision

Solution Approach 1:

The standard cell layout is segmented into distinct functional regions including active regions, gate structures, and power rail regions. This segmentation allows each component to be independently optimized for its specific function while maintaining overall miniaturization goals, addressing the manufacturing precision challenge by providing clear design boundaries for each segment.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the IC layout are assigned different quality characteristics - active regions are optimized for transistor performance, power rail regions for electrical connectivity, and isolation regions for electrical separation. This local quality approach allows the miniaturized IC to maintain high performance in critical areas while meeting strict manufacturing specifications through region-specific design optimization.

Inventive Principle:
Principle #3Local quality

2Speed

If active regions are made larger, then speed performance is improved, but area consumption increases

Engineering Contradiction:
Improvespeed performanceVSAvoidlayout area
Core Design Contradiction:
SpeedVSArea of stationary object

Solution Approach 1:

The active regions are arranged in a multi-dimensional layout configuration that optimizes their spatial distribution. By carefully positioning active regions at different locations and orientations within the standard cell, the design achieves larger effective active region area for improved speed performance while maintaining compact overall layout area through efficient three-dimensional spatial arrangement.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The layout structure employs nested arrangements where gate structures overlap with active regions, and power rails are positioned to maximize space utilization. This nesting allows larger active regions to be incorporated into the design for improved speed performance without proportionally increasing the overall layout area, as components are efficiently packed and overlapped.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Reliability

If power rails are positioned closer to active regions, then resistance is reduced, but electrical interference increases

Engineering Contradiction:
ImproveresistanceVSAvoidelectrical interference
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

Shallow trench isolation structures are introduced as intermediary elements between the power rails and active regions. These isolation structures provide electrical separation that prevents harmful interference while maintaining sufficiently close positioning of power rails to active regions to minimize resistance. The intermediary isolation layers act as mediators that allow the power delivery function while blocking electrical interference.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The electrical properties of different regions are locally optimized - power rail regions are designed for low resistance connectivity with close positioning to active regions, while isolation regions are designed for electrical separation to prevent interference. This local quality differentiation allows the system to simultaneously achieve low resistance power delivery and electrical isolation where needed.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS11755813B2Integrated circuit structure
Publication Date: 2023.09.12 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11755813B2 patent drawing
  • US11755813B2 patent drawing
  • US11755813B2 patent drawing

AI summary

An IC structure includes a first cell and a first and second rail. The first cell includes a first and second active region and a first, a second and a third gate structure. The first active region having a first dopant type. The second active region having a second dopant type. The first gate structure extending in a second direction, overlapping the first or the second active region. The second gate structure extending in the second direction, and overlapping a first edge of the first or second active region. The third gate structure extending in the second direction, and overlapping at least a second edge of the first or second active region. The first rail extending in the first direction and overlapping a middle portion of the first active region. The second rail extending in the first direction and overlapping a middle portion of the second active region.