RC Assembly Resistive Lines Under Capacitive Units

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Solution Overview

Problem

Prior art RC assemblies face challenges in fabricating resistive units with sharp corners, leading to performance non-uniformity and parasitic resistance issues due to rounded corners resulting from processing limitations, which complicates the design and operation of RC circuits.

Innovation Solution

The RC assembly features a resistive structure with narrow resistive lines extending from a wide-end-region under a capacitive unit, where these resistive lines are arranged in parallel, reducing parasitic resistance and simplifying fabrication by eliminating the need for complex geometric arrangements of contact and resistive regions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If sharp corners are fabricated for resistive regions to achieve precise geometric specifications, then manufacturing precision is improved, but processing limitations cause rounded corners leading to performance non-uniformity

Engineering Contradiction:
Improvegeometric precision of resistive regionsVSAvoidperformance uniformity of resistive units
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The resistive structure is divided into multiple discrete contact regions and resistive regions arranged in an alternating pattern. This segmentation allows each region to be independently optimized and fabricated, reducing the impact of corner rounding on overall performance uniformity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the resistive structure are designed with different properties - contact regions have larger area for lower resistance while resistive regions have smaller area for higher resistance. This local differentiation compensates for processing variations and ensures consistent performance across multiple units.

Inventive Principle:
Principle #3Local quality

2Reliability

If multiple contact regions and resistive regions are arranged in complex geometric patterns, then electrical contact is improved, but device complexity increases

Engineering Contradiction:
Improveelectrical contact qualityVSAvoidgeometric arrangement complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The resistive structure employs an asymmetric alternating pattern where contact regions and resistive regions differ in shape, size, and electrical properties. This asymmetric design simplifies the overall geometry while ensuring optimal electrical contact and resistance characteristics.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The alternating contact-resistive region pattern serves multiple functions simultaneously: providing electrical contact points, establishing resistance values, and ensuring uniform performance across fabrication variations. This multi-functionality reduces the need for additional complex structures.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Productivity

If resistive structures are integrated under capacitive units, then integration density is improved, but fabrication complexity increases

Engineering Contradiction:
Improveintegration densityVSAvoidfabrication process complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The resistive structure is merged with the capacitive unit by integrating it directly underneath the capacitive electrodes. This combination increases integration density while the alternating region pattern simplifies the fabrication process by using standard photolithography techniques.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The resistive structure is positioned in a different spatial dimension (underneath) relative to the capacitive unit, allowing both components to coexist without interfering with each other's fabrication. This vertical integration maximizes space utilization while maintaining simple planar processing.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the uniformity of resistive unit performance, simplifies fabrication, and allows for higher integration density by integrating resistive structures under capacitive units, thereby improving the overall performance and integration capabilities of RC circuits.

Implementation Method 1

The resistive structure has narrow resistive lines extending from a wide-end-region under a capacitive unit

Methodology Applied
Scientific EffectElectrical Resistance: Electrical Resistance

Implementation Method 2

The capacitive unit includes a plurality of capacitive subunits arranged in a capacitive array

Methodology Applied
Scientific EffectCapacitance: Capacitance

Data Source

PatentUS10910358B2Integrated assemblies having capacitive units, and having resistive structures coupled with the capacitive units
Publication Date: 2021.02.02 MICRON TECHNOLOGY INC
  • US10910358B2 patent drawing
  • US10910358B2 patent drawing
  • US10910358B2 patent drawing

AI summary

Some embodiments include an integrated assembly having a capacitive unit which includes a plurality of capacitive subunits. A first conductive structure is under a first group of the capacitive subunits and is coupled with them. A second conductive structure is under a second group of the capacitive subunits and is coupled with them. A third conductive structure is over the capacitive subunits and is coupled with all of the capacitive subunits. A resistive structure extends under the first and second conductive structures. The resistive structure has a first-end-region under the first conductive structure and coupled with the first conductive structure. The resistive structure includes resistive lines extending from the first-end-region to second-end-regions.