RC Extraction Using Location-Based Thickness Adjustments
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Solution Overview
Problem
Existing RC extraction methods are inaccurate due to significant variations in feature dimensions caused by manufacturing processes like CMP and etch, leading to incorrect analysis results when using as-designed dimensions instead of as-manufactured dimensions.
Innovation Solution
A method that uses location-based prediction data to perform net-specific top and bottom adjustments for thickness predictions, considering both CMP and etch manufacturing processes, and integrates this data into RC extraction tools for accurate analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If RC extraction is performed using as-designed dimensions, then the analysis process is simple and fast, but the analysis results are incorrect due to manufacturing variations
Solution Approach 1:
The patent applies preliminary action by performing manufacturing process simulations (CMP, etch, lithography) before RC extraction to predict as-manufactured dimensions. This allows the RC analysis to use accurate predicted dimensions rather than ideal design dimensions, improving measurement precision while managing complexity through automated simulation workflows
Solution Approach 2:
The patent introduces an intermediary layer of manufacturing simulation tools that translate design dimensions into predicted as-manufactured dimensions. This intermediary process accounts for manufacturing variations and provides corrected geometric data to the RC extraction tool, resolving the contradiction between simplicity and accuracy
2Measurement precision
If multiple manufacturing processes are considered in RC extraction, then the analysis accuracy improves, but the processing time and computational resources increase
Solution Approach 1:
The patent segments the manufacturing process into distinct simulation modules (CMP simulation, etch simulation, lithography simulation) that can be executed independently. Each process contributes specific variation parameters that are combined to produce the final as-manufactured dimensions, allowing for optimized computation and parallel processing
Solution Approach 2:
The patent changes the approach from using fixed design dimensions to using dynamic predicted dimensions that incorporate manufacturing variations. By parameterizing the dimension predictions based on process variations (dishing, erosion, metal losses), the system achieves higher accuracy while managing computational complexity through parameter-based models
Data Source
AI summary
A method, system, and computer program product are disclosed for performing RC extraction. The present approach can consider multiple types of manufacturing processes, and allows location-based prediction data to be used in the context of net-based analysis. RC extraction can be more accurately performed based upon net-specific top and bottom adjustments to thickness prediction that are location-based. The net-based prediction data can be used for other purposes as well, such as to perform electrical hotspot analysis, to visually display physical properties of the nets, or allow queries for other data analysis purposes.