Reactor Cleaning via Plasma and Thermal Species

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Solution Overview

Problem

Vapor-phase reactor systems face contamination issues due to unwanted material buildup on internal surfaces, leading to process drift and increased defects, necessitating effective cleaning methods to maintain high process availability.

Innovation Solution

A reactor system and method incorporating both plasma-activated and non-plasma-activated cleaning species, where a remote plasma unit generates radicals and a bypass line introduces thermally activated cleaning chemistry to selectively remove contaminants from internal surfaces, allowing for preferential etching based on temperature, thereby preventing damage and enabling rapid recovery of the reaction chamber.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If plasma-based cleaning is used to remove contaminants from internal surfaces, then cleaning effectiveness is improved, but risk of damage to components increases

Engineering Contradiction:

Improvecleaning effectivenessVSAvoidcomponent damage risk

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The cleaning process is segmented into two distinct pathways: a plasma-based pathway for robust contaminant removal and a thermal pathway for gentle cleaning. The system divides the cleaning function between plasma activated cleaning species (from remote plasma unit) and thermally activated cleaning species (from bypass line), allowing selective application based on contamination severity and component sensitivity.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system changes the activation parameter of the cleaning chemistry by providing both plasma-activated and thermally activated cleaning species. By controlling the activation method (plasma vs. thermal) and corresponding parameters (power, temperature), the system can adjust cleaning aggressiveness to match the specific cleaning needs while protecting sensitive components.

Inventive Principle:

Principle #35Parameter changes

2Productivity

If extended operation is maintained to maximize productivity, then production output increases, but contamination buildup on internal surfaces worsens

Engineering Contradiction:

Improveproduction outputVSAvoidprocess drift

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The system performs preliminary cleaning action by continuously or periodically removing contaminants from internal surfaces during or between production runs. The dual-pathway cleaning system can be activated to prevent contamination buildup before it causes process drift, allowing extended productive operation without sacrificing manufacturing precision.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The cleaning system enables continuous operation by maintaining clean internal surfaces through periodic or continuous cleaning action. The plasma and thermal cleaning pathways can operate continuously or intermittently to remove contaminants as they form, ensuring uninterrupted high-precision manufacturing without requiring frequent shutdowns for maintenance.

Inventive Principle:

Principle #20Continuity of useful action

3Reliability

If intensive cleaning processes are applied to remove all contaminants, then cleanliness is improved, but recovery time increases

Engineering Contradiction:

ImprovecleanlinessVSAvoidrecovery time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The system applies partial cleaning action by using the gentler thermal pathway for routine maintenance cleaning and reserving the more intensive plasma pathway for severe contamination cases. This selective application of cleaning intensity removes only the necessary amount of contamination while minimizing recovery time and avoiding unnecessary aggressive treatment.

Inventive Principle:

Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively removes unwanted material without damaging components, reduces process drift, and increases reactor system uptime by allowing for shorter recovery times and minimizing the need for subsequent chamber conditioning.

Implementation Method 1

a remote plasma unit fluidly connected to the chemical storage assembly... generating a plasma activated cleaning species

Methodology Applied

Scientific EffectPlasma: Plasma

Implementation Method 2

heating the susceptor to a temperature above the melting point of the material... thereby removing the material from the surface of the susceptor

Methodology Applied

Scientific EffectThermal activation: Heating

Data Source

PatentUS20220349051A1Reactor systems and methods for cleaning reactor systems

Publication Date: 2022.11.03 ASM IP HLDG BV

AI summary

A reaction system including a chemical storage assembly in fluid communication with both a remote plasma unit and a bypass line for providing both a plasma activated cleaning species and a non-plasma activated cleaning species to a reaction chamber.