Recess Depth Measurement Using Brightness and Geometry Modeling
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Solution Overview
Problem
Existing methods for measuring the depth of recesses in samples are inaccurate due to variations in material and pattern density, leading to inconsistencies in depth estimation.
Innovation Solution
A method involving the use of a scanning electron microscope to measure the depth of recesses by analyzing the relationship between the brightness distribution, area, and dimension of the recess, utilizing a mathematical model to derive a depth index through image analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If luminance information is used to estimate depth based on electron emission amount, then depth measurement can be performed, but measurement precision deteriorates due to variations in sample material and pattern density
Solution Approach 1:
The invention changes the measurement parameters from luminance information alone to a combination of luminance information and electron emission amount information. By utilizing multiple parameters simultaneously, the measurement system can distinguish between depth variations and material/density variations, thereby improving measurement precision while maintaining reliability across different sample types
Solution Approach 2:
The invention introduces electron emission amount information as an intermediary parameter that mediates between the luminance signal and the actual depth. This additional parameter acts as a reference that helps correct for material and density variations, enabling more accurate depth estimation that is independent of sample composition
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate depth measurement of recesses in samples regardless of material or pattern density variations, improving measurement precision.
Implementation Method 1
detection of backscattered electrons that are reflected at a bottom of the hole or the trench and are emitted onto the sample after passing through a side wall of the hole or the trench
Data Source
AI summary
The present disclosure pertains to a method, a system, and a computer-readable medium for highly precisely measuring the depth of a recess formed in a sample even when, inter alia, the material or pattern density of the sample differs. The method, system, and computer-readable medium involve: using a measurement tool to acquire an image or a brightness distribution of a region including a recess formed in a sample; extracting a first characteristic of the interior of the recess, and a second characteristic pertaining to the dimensions or area of the recess, from the acquired image or brightness distribution; and inputting the extracted first characteristic and second characteristic to a model that indicates the relationship between the first characteristic, the second characteristic, and a depth index of the recess to thereby derive the depth index of the recess.