Substrate Support Assembly with Recessed Insulator for Residual Heat Isolation

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Solution Overview

Problem

Conventional substrate support systems in high-temperature processing environments face challenges in protecting sensitive components from elevated temperatures, leading to potential damage and operational failures during emergency machine off conditions due to residual heat transfer.

Innovation Solution

A substrate support assembly featuring a recessed insulator plate and a ceramic or alumina insulator between the puck and power distribution assembly, which reduces heat transfer and maintains temperature-sensitive components within safe operational ranges, using a conical washer for secure electrical connections.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If conventional substrate support systems are used in high-temperature processing environments, then substrate processing can be performed, but sensitive components are exposed to elevated temperatures causing potential damage and operational failures

Engineering Contradiction:

Improvetemperature protection of sensitive componentsVSAvoidoperational reliability during emergency conditions

Core Design Contradiction:

TemperatureVSReliability

Solution Approach 1:

An insulator plate is introduced as an intermediary component between the heated substrate support puck and the power distribution assembly. This insulator plate acts as a thermal barrier that mediates the heat transfer path, protecting temperature-sensitive electrical components from direct exposure to high temperatures while allowing the substrate processing to proceed at required temperatures.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The substrate support assembly is segmented into distinct thermal zones: a high-temperature zone for the substrate processing area and a low-temperature zone for the power distribution assembly. The insulator plate creates this segmentation by physically separating components that require different temperature environments, allowing each segment to operate within its optimal temperature range.

Inventive Principle:

Principle #1Segmentation

2Productivity

If the substrate support assembly operates at high temperatures, then substrate processing efficiency is maintained, but heat transfer to adjacent components causes damage during emergency machine off conditions

Engineering Contradiction:

Improvesubstrate processing efficiencyVSAvoidheat transfer to adjacent components

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The insulator plate serves as a thermal intermediary that blocks harmful heat transfer to adjacent components while allowing the substrate support assembly to maintain high operating temperatures for efficient substrate processing. This mediator prevents the harmful thermal effects from propagating to temperature-sensitive components.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

Different portions of the assembly are assigned different thermal properties: the substrate support puck is designed for high-temperature operation to maintain processing efficiency, while the power distribution assembly is thermally isolated to remain at lower temperatures. The insulator plate creates this local quality differentiation by providing thermal protection specifically to the power distribution components.

Inventive Principle:

Principle #3Local quality

3Device complexity

If no thermal insulation is provided, then the structure remains simple, but sensitive components are damaged by residual heat during emergency conditions

Engineering Contradiction:

Improvestructural simplicityVSAvoidcomponent integrity during emergency conditions

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

A relatively simple insulator plate is introduced as a minimal intermediary component to provide thermal protection. This single element adds minimal structural complexity while effectively preventing heat transfer to sensitive components, maintaining reliability during emergency conditions without significantly complicating the overall assembly.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The insulator plate is designed as a relatively simple, potentially replaceable component that provides essential thermal protection. By using a straightforward insulating structure rather than a complex active cooling system, the design accepts that this component may need replacement over time while maintaining overall system reliability and simplicity.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively shields sensitive components from high temperatures, preventing damage and ensuring continued operation by limiting heat transfer and maintaining component integrity during emergency conditions.

Implementation Method 1

The insulator reduces heat transfer to the component of the process chamber in an emergency machine off (EMO) condition

Methodology Applied

Scientific EffectThermal insulation: Thermal Insulation

Data Source

PatentUS20230380016A1High-temperature substrate support assembly with failure protection

Publication Date: 2023.11.23 APPLIED MATERIALS INC

AI summary

A substrate support assembly includes a puck, comprising a heating element, a power distribution assembly, and an insulator comprising at least one of alumina or thermoplastic disposed between the puck and the power distribution assembly, wherein an electrical connection between the heating element and the power distribution assembly comprises a terminal and a conical washer.