Redundantable Robot Assembly for Continuous Workpiece Transfer
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Solution Overview
Problem
Existing robot assemblies in semiconductor fabrication facilities are prone to failure, leading to disruptions in the continuous flow of workpieces and reduced throughput due to the lack of redundancy in their components, which can cause equipment downtime and inefficiencies.
Innovation Solution
A redundantable robot assembly with independent robots and redundant components that can operate even when parts fail, allowing for seamless switching between operational and inoperative parts, enabling continuous workpiece transfer and minimizing downtime through in-situ servicing and automatic recalibration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple independent robot arms are used to double throughput, then productivity increases, but device complexity increases
Solution Approach 1:
The robot assembly is divided into multiple independent robot arms, each capable of autonomous operation. This segmentation allows the system to process multiple workpieces simultaneously through different locations, thereby doubling throughput while maintaining manageable complexity through modular design
Solution Approach 2:
Each robot arm is designed with universal capabilities to perform the same transfer functions independently. This multi-functionality ensures that any robot can handle any workpiece transfer task, enabling flexible operation and maintaining system productivity even when individual components are serviced or replaced
2Productivity
If faster robot movement is implemented to improve efficiency, then productivity increases, but reliability decreases
Solution Approach 1:
Redundant robot components are pre-configured in the system before failures occur. When a robot fails, the system can immediately switch to the redundant component without interruption to workpiece transfer operations, cushioning the impact of failures and maintaining continuous productivity
Solution Approach 2:
The system dynamically changes operational parameters by switching between different robot components based on their operational status. When primary robots are operating at high speed, the system maintains readiness to switch to standby robots, allowing parameter changes in robot selection without changing the fundamental high-speed transfer capability
3Reliability
If redundant components are added to improve reliability, then reliability increases, but device complexity increases
Solution Approach 1:
Redundant robot components are created as identical copies of the primary robots. This copying approach simplifies the overall system architecture by using standardized, repeatable modules rather than complex unique components, making the redundant system easier to design, manufacture, and maintain
Solution Approach 2:
The redundant robot components are designed as separable, extractable units that can be independently removed for servicing or replacement without affecting the operation of the primary robot system. This extraction capability reduces operational complexity by allowing maintenance without system shutdown
Data Source
AI summary
A redundantable robotic mechanism is disclosed for improving reliability of tranport equipment. The redundantable robot assembly typically comprises independent robots with separate controls, motors, linkage arms, or power, thus providing the capability of operation even if parts of the assembly are not operational or when parts of the assembly are removed for repair. The redundantable robot assembly can be also designed to allow in-situ servicing, e.g. servicing one robot when the other is running. The disclosed redundantable robot assembly provides virtual uninterrupted process flow, and thus greatly increases the yield for the manufacturing facility.