Cooled Reflective Adapter Plate for Deposition Chamber
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Solution Overview
Problem
In semiconductor manufacturing, thermal processes for substrate annealing and rapid thermal processing are inefficient due to heat energy loss during substrate transfer between separate chambers, leading to increased process time and cost.
Innovation Solution
A deposition chamber with an adapter plate that includes a lamp mounting facility and a reflective surface for focusing radiant energy onto the substrate, allowing for in-chamber heating before, during, or after material deposition, thereby minimizing energy loss and optimizing thermal treatment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If thermal processing is performed in a separate chamber, then substrate heating can be performed, but heat energy is lost during substrate transfer and machine utilization decreases
Solution Approach 1:
The patent combines the thermal processing function with the deposition chamber by integrating a lamp assembly and heating system directly into the deposition chamber structure. This allows substrate heating to be performed in the same chamber where deposition occurs, eliminating the need for separate thermal processing chambers and reducing heat loss during transfer between chambers.
Solution Approach 2:
The deposition chamber is designed to perform multiple functions: both material deposition and thermal processing. The chamber includes both deposition sources and heating lamps, enabling it to serve as both a deposition chamber and a thermal processing chamber, thereby improving machine utilization and reducing energy loss.
2Productivity
If radiant energy is directed to substrate for heating, then thermal processing efficiency improves, but heat energy may be lost to chamber components
Solution Approach 1:
The patent introduces a reflective adapter plate with a reflective surface as an intermediary between the lamp assembly and the substrate. This reflective surface directs and concentrates radiant energy onto the substrate, improving heating efficiency while the cooled portions of the adapter plate act as shields to prevent heat loss to chamber components.
Solution Approach 2:
The adapter plate is designed with differentiated zones: a reflective surface facing the lamp to concentrate energy, and cooled portions surrounding the substrate to act as heat shields. This local differentiation allows simultaneous achievement of efficient energy delivery to the substrate and protection from heat loss to chamber components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables efficient heating of substrates with improved energy absorption, reducing process time and cost by maintaining heat within the chamber, enhancing the semiconductor device fabrication process.
Implementation Method 1
a reflective surface for focusing radiant energy to a surface of the substrate
Implementation Method 2
lamp mounting facility and a reflective surface for focusing radiant energy
Data Source
AI summary
In one embodiment, an adapter plate for a deposition chamber is provided. The adapter plate comprises a body, a mounting plate centrally located on the body, a first annular portion extending longitudinally from a first surface of the mounting plate and disposed radially inward from an outer surface of the mounting plate, a second annular portion extending longitudinally from an opposing second surface of the mounting plate and disposed radially inward from the outer surface of the mounting plate, and a mirror-finished surface disposed on the interior of the second annular portion, the mirror-finished surface having an average surface roughness of 6 Ra or less.