Process Chamber Reflector With Segmented Cooling Channels

Solution Overview

Problem

High-temperature cleaning processes in semiconductor process chambers can damage components due to uneven temperature distribution and high maximum temperatures, necessitating improved cleaning methods and equipment that maintain component integrity while achieving higher cleanliness and faster cleaning times.

Innovation Solution

The introduction of a reflector with a cooling channel system that allows coolant flow, ensuring uniform temperature distribution and reducing maximum temperatures during high-temperature processes, thereby preventing component damage and enhancing cleaning efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If higher temperatures are used during cleaning procedures, then cleaning effectiveness and speed are improved, but components in the chamber are damaged due to high temperatures

Engineering Contradiction:

Improvecleaning speedVSAvoidcomponent damage from high temperature

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The bottom plate is divided into multiple sectors with independent cooling channels in each sector, allowing localized temperature control across different regions of the reflector during high-temperature cleaning processes

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different sectors of the bottom plate can have different cooling intensities applied to them, enabling each region to maintain optimal temperature characteristics for its specific functional requirements during cleaning operations

Inventive Principle:

Principle #3Local quality

2Manufacturing precision

If higher temperatures are used during cleaning procedures, then level of cleanliness is improved, but components in the chamber are damaged due to high temperatures

Engineering Contradiction:

Improvecleanliness levelVSAvoidcomponent damage from high temperature

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The bottom plate is divided into multiple sectors with independent cooling channels in each sector, allowing localized temperature control across different regions of the reflector during high-temperature cleaning processes

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different sectors of the bottom plate can have different cooling intensities applied to them, enabling each region to maintain optimal temperature characteristics for its specific functional requirements during cleaning operations

Inventive Principle:

Principle #3Local quality

3Reliability

If cooling channels are added to the reflector, then temperature control and component protection are improved, but device complexity increases

Engineering Contradiction:

Improvecomponent integrityVSAvoidcooling channel system complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The cooling channels are integrated directly into the bottom plate structure itself, combining the cooling function with the existing structural component rather than adding separate cooling apparatus

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The bottom plate serves multiple functions: it provides structural support for the reflector while simultaneously acting as a cooling device with integrated channels that can be controlled independently across different sectors

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The cooling channel system enables higher internal temperatures during cleaning, resulting in improved cleanliness and faster process completion without damaging the reflector components, thus addressing the challenge of maintaining component integrity and efficiency.

Implementation Method 1

The cooling channel system enables higher internal temperatures during cleaning, resulting in improved cleanliness and faster process completion without damaging the reflector components

Methodology Applied

Scientific EffectHeat transfer: Conduction (thermal)

Data Source

PatentUS20240352618A1Reflector for process chamber

Publication Date: 2024.10.24 APPLIED MATERIALS INC

AI summary

A reflector for use in a semiconductor process chamber is provided including: a body; and a bottom plate connected to a lower portion of the body, the bottom plate having a bottom surface, a top surface, and one or more side surfaces connecting the bottom surface with the top surface. A cross section of the bottom plate that extends to opposing locations on the one or more side surfaces includes a center, the cross section is divided into two or more sectors that extend from the center of the cross section, and the cross section includes a cooling channel comprising an inlet and one or more outlets.