Reflector With Segmented Optical And Supporter Surfaces

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

The manufacturing of reflectors for hard X-rays, soft x-rays, EUV radiation, and/or neutrons is challenging due to strict figure error and surface roughness requirements, making existing methods difficult, expensive, and time-consuming.

Innovation Solution

A reflector design comprising a hollow body with an interior surface featuring an optical surface part and a supporter surface part, where the optical surface part has a predetermined optical power and the supporter surface part does not, allowing for easier manufacturing and reduced figure error and surface roughness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional manufacturing methods are used to create reflectors with strict figure error and surface roughness requirements, then optical performance is improved, but manufacturing difficulty, cost, and time increase

Engineering Contradiction:
Improvefigure error and surface roughnessVSAvoidmanufacturing difficulty
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The reflector surface is segmented into two distinct parts: an optical surface part with predetermined optical power for reflecting radiation, and a supporter surface part without optical power for structural support. This segmentation allows each part to be manufactured independently with appropriate precision requirements, reducing overall manufacturing difficulty while maintaining optical performance.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different parts of the reflector are given different surface qualities: the optical surface part has high precision figure error and surface roughness control for optimal radiation reflection, while the supporter surface part has relaxed tolerances for structural support. This local differentiation of quality requirements reduces manufacturing complexity and cost.

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If conventional manufacturing methods are used to create reflectors with strict figure error and surface roughness requirements, then optical performance is improved, but manufacturing cost increases

Engineering Contradiction:
Improvefigure error and surface roughnessVSAvoidmanufacturing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The reflector is divided into optical and supporter surface parts, allowing cost-effective manufacturing by applying high-precision processes only where necessary (optical surface) and standard processes elsewhere (supporter surface), thereby reducing overall manufacturing cost while maintaining optical performance.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

High manufacturing precision is applied locally only to the optical surface part where it is critical for optical performance, while the supporter surface part uses lower precision manufacturing, optimizing the balance between cost and performance.

Inventive Principle:
Principle #3Local quality

3Manufacturing precision

If conventional manufacturing methods are used to create reflectors with strict figure error and surface roughness requirements, then optical performance is improved, but manufacturing time increases

Engineering Contradiction:
Improvefigure error and surface roughnessVSAvoidmanufacturing time
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

By segmenting the reflector into optical and supporter surface parts, the manufacturing process can proceed in parallel or sequence with reduced total time, as the supporter surface does not require the same level of precision work, thereby improving manufacturing productivity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

High-precision manufacturing operations are concentrated only on the optical surface part, reducing the total volume of precision work required and thereby reducing manufacturing time while maintaining the necessary optical performance.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed solution enables the manufacture of reflectors with low figure error and surface roughness, improving the efficiency and cost-effectiveness of the process while maintaining high optical performance.

Implementation Method 1

the interior surface having at least one optical surface part configured to reflect radiation

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentEP3807718B1Reflector and method of manufacturing a reflector
Publication Date: 2025.04.09 ASML NETHERLANDS BV
  • EP3807718B1 patent drawingFigure 1
  • EP3807718B1 patent drawingFigure 2~3
  • EP3807718B1 patent drawingFigure 4~6

AI summary

A reflector comprising a hollow body having an interior surface defining a passage through the hollow body, the interior surface having at least one optical surface part configured to reflect radiation and a supporter surface part, wherein the optical surface part has a predetermined optical power and the supporter surface part does not have the predetermined optical power. The reflector is made by providing an axially symmetric mandrel; shaping a part of the circumferential surface of the mandrel to form at least one inverse optical surface part that is not rotationally symmetric about the axis of the mandrel; forming a reflector body around the mandrel; and releasing the reflector body from the mandrel whereby the reflector body has an optical surface defined by the inverse optical surface part and a supporter surface part defined by the rest of the outer surface of the mandrel.