Remote-Driven Robot Arm for Substrate Transport
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Solution Overview
Problem
Conventional electronic device manufacturing systems face challenges in efficiently and precisely transporting substrates between process chambers and load lock chambers, particularly in vacuum environments, where particle generation and limited space constraints are concerns.
Innovation Solution
A robot apparatus with an upper arm, forearm, and wrist member that can independently rotate in the X-Y plane, allowing for flexible and precise substrate handling, including nonfocalized process chambers, with remote drive systems minimizing particle generation and reducing the size of the transfer chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If conventional robot systems are used to transport substrates between chambers, then substrate transport function is provided, but the system occupies large space and generates particles in vacuum environment
Solution Approach 1:
The drive system is extracted from the chamber environment and placed externally. Motors and control mechanisms are positioned outside the vacuum chamber, connected to the robot arm through magnetic coupling or flexible transmissions. This removes the primary particle generation source from the vacuum environment while maintaining robot functionality.
Solution Approach 2:
Traditional mechanical drive systems with gears, belts, and motors are replaced with magnetic coupling mechanisms or frictionless bearings. This substitution eliminates mechanical contact that generates particles, providing a clean operation suitable for vacuum environments.
2Volume of stationary object
If traditional robot arms are used for substrate transport, then substrate handling is achieved, but the transfer chamber size is large
Solution Approach 1:
The robot arm operates primarily in the X-Y plane with independent rotation capabilities at each joint, utilizing planar motion dimensions efficiently. This dimensional approach allows compact chamber design while maintaining full substrate access capability to all process chambers.
Solution Approach 2:
The robot arm employs dynamic, independently rotatable joints rather than fixed mechanical linkages. Each segment (upper arm, forearm, wrist member) can rotate independently about its axis, providing adaptive motion that reduces the required chamber volume while maintaining operational flexibility.
3Adaptability or versatility
If fixed-axis robot arms are used, then simple structure is maintained, but nonfocalized process chambers cannot be serviced
Solution Approach 1:
The robot arm features dynamically adjustable rotation axes at each joint (shoulder, elbow, wrist). Each joint can rotate independently about its axis, allowing the arm to adapt its configuration to service both focalized and nonfocalized process chambers. This dynamic adaptability enables versatile chamber access without requiring multiple specialized robots.
Solution Approach 2:
The robot arm design with independent rotation at each joint provides universal capability to service various chamber types and configurations. A single robot system can handle both focalized and nonfocalized chambers, replacing the need for multiple specialized positioning systems.
4Productivity
If multiple robots are deployed to service multiple chambers, then chamber coverage is improved, but system cost and complexity increase
Solution Approach 1:
A single robot system with independent rotation capability at each joint serves multiple process chambers. The robot can dynamically reposition itself to access different chambers, eliminating the need for multiple dedicated robots and reducing overall system complexity while maintaining high throughput.
Solution Approach 2:
Multiple substrate handling functions are merged into a single robot system. The robot performs transport, positioning, and chamber access functions that would traditionally require separate systems, consolidating operations to reduce cost and complexity while maintaining productivity.
Data Source
AI summary
A substrate transporting robot apparatus is disclosed which is adapted to transport a substrate to and from a chamber of an electronic device processing system. The apparatus may include an upper arm rotatable in an X-Y plane, a forearm rotatable relative to the upper arm in the X-Y plane, and a wrist member rotatable relative to the forearm in the X-Y plane, the wrist member including an end effector adapted to carry a substrate. The wrist member may be subjected to independent rotation such that various degrees of yaw may be imparted to the wrist member. In some aspects, the independent rotation is provided without a motive power device (e.g., motor) being provided on the arms or wrist member, i.e., the wrist member may be remotely driven. Systems and methods using the robot apparatus are also provided as are numerous other aspects.