Removable Tray Assembly Dovetail Magnetic Fasteners
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Solution Overview
Problem
The existing tray assemblies in chemical mechanical polishing (CMP) systems require extensive maintenance time due to the need to detach and reattach multiple fasteners to clean the collection region, which hampers efficiency and increases the risk of damaging sensors during the process.
Innovation Solution
A removable tray assembly with a dual-tray structure utilizing dovetail joints and magnetic fasteners, allowing the lower tray to be easily slid out for cleaning without detaching the sensor, significantly reducing the number of fasteners needed and maintaining attachment of the sensor to the upper tray, thereby minimizing maintenance time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If traditional tray assemblies use multiple fasteners to secure the collection region, then the structural stability is improved, but the maintenance time increases due to extensive detachment and reattachment operations
Solution Approach 1:
The tray assembly is divided into separate components: an upper tray and a lower tray that can be easily detached from each other. This segmentation allows the collection region to be accessed and cleaned without removing the entire tray assembly from the CMP system, significantly reducing maintenance time while maintaining structural stability through the interlocking joint design.
Solution Approach 2:
The tray assembly incorporates a dynamic detachment mechanism where the lower tray can be quickly removed from the upper tray through a simple pulling motion on the protrusion. This dynamic design enables rapid maintenance operations while ensuring secure attachment during operation through the mechanical interlocking of the joint structures.
2Ease of operation
If the sensor is detachable from the tray assembly, then the ease of cleaning is improved, but the risk of sensor damage during the cleaning process increases
Solution Approach 1:
The sensor is segmented from the lower tray, allowing it to remain attached to the upper tray while the lower tray is detached for cleaning. This segmentation enables easy access to the collection region for cleaning operations without exposing the sensor to potential damage, as the sensor remains secured to the upper tray during maintenance activities.
Solution Approach 2:
The upper tray acts as an intermediary structure that secures the sensor during cleaning operations. When the lower tray is removed for cleaning, the sensor remains attached to the upper tray, which protects it from damage while still allowing the collection region to be accessed. The upper tray serves as a protective intermediary between the sensor and the cleaning process.
3Reliability
If the tray assembly uses a secure attachment mechanism, then the reliability is improved, but the device complexity increases due to multiple fasteners and attachment points
Solution Approach 1:
The attachment mechanism merges multiple fastening functions into a single integrated joint structure. The interlocking joint combines the protrusion and recessed features into one unified attachment system that secures the lower tray to the upper tray, eliminating the need for multiple separate fasteners while maintaining reliable attachment through the combined mechanical interlocking design.
Solution Approach 2:
The interlocking joint structure serves multiple functions simultaneously: it provides secure attachment, enables easy detachment for cleaning, and maintains structural integrity during operation. This multi-functional design reduces the overall complexity by consolidating multiple fastening requirements into a single universal joint mechanism that handles all attachment needs.
4Productivity
If the collection region is easily accessible for cleaning, then the productivity is improved, but the particle infiltration risk increases during the cleaning process
Solution Approach 1:
The tray assembly is segmented into an upper tray and a lower tray that can be easily detached. This segmentation allows the collection region to be quickly accessed by simply removing the lower tray, improving cleaning efficiency. The segmented design also allows for rapid reassembly after cleaning, minimizing the time the system is open to particle infiltration.
Solution Approach 2:
The lower tray is designed to be easily detachable before cleaning is needed, allowing maintenance personnel to quickly remove it and access the collection region. This preliminary readiness for detachment enables rapid cleaning operations while minimizing the duration when the system is vulnerable to particle infiltration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces maintenance time by 80-90% compared to traditional systems, enhancing efficiency and reducing the risk of sensor damage during cleaning, while maintaining secure attachment and preventing particle infiltration.
Implementation Method 1
magnetic fasteners
Implementation Method 2
dovetail joints
Data Source
AI summary
The present disclosure provides a tray assembly having a dual-structure. The tray assembly comprises an upper tray and a lower tray. The lower tray is capable of being easily disengaged from the upper tray by use of a dovetail joint that allows the lower tray to slidably move relative to the upper tray. The tray assembly also utilizes magnets to reduce the use of mechanical joints. The combination of the magnets together with the dovetail joint provides a quick and efficient way of sliding the lower tray in and out from the upper tray. The lower tray having a collection region collects any external, foreign materials generated during a chemical mechanical polishing/planarizing process. After the cleaning process, the lower tray can be slid back into the upper tray for use.