Repulsive-force electrostatic actuator with dielectric insulation

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Solution Overview

Problem

Conventional repulsive-force electrostatic actuators face issues such as shorting between electrodes within a layer and between layers, limiting their effectiveness and reliability.

Innovation Solution

A repulsive-force electrostatic actuator design featuring two actuator layers with opposing electrode patterns aligned in a specific direction, separated by a vacuum, air, or dielectric material, and connected to a common voltage source, preventing shorting by using a robust dielectric substrate instead of air for insulation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional repulsive-force electrostatic actuators use air or thin dielectric insulation between electrodes, then device complexity is reduced, but shorting between electrodes occurs

Engineering Contradiction:
Improveshorting preventionVSAvoidinsulation structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies local quality by using a robust dielectric substrate specifically at the electrode interfaces where shorting risk is highest, while maintaining simpler insulation elsewhere. The dielectric substrate is strategically positioned between opposing electrode patterns to provide localized insulation exactly where needed, preventing shorting without requiring complex insulation throughout the entire device.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent employs composite materials by combining a robust dielectric substrate with additional insulation layers to create a multi-layer insulation structure. This composite approach integrates materials with different properties - the robust dielectric provides base insulation and mechanical support, while additional layers enhance shorting prevention - achieving high reliability without excessive complexity through material composition rather than structural complexity.

Inventive Principle:
Principle #40Composite materials

2Reliability

If robust dielectric substrate is used for insulation between electrode patterns, then shorting prevention is improved, but manufacturing cost increases

Engineering Contradiction:
Improveshorting preventionVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent applies segmentation by dividing the insulation function into distinct layers - a robust dielectric substrate forming the base insulation layer, and additional insulation layers positioned at specific locations where shorting risk is highest. This segmented approach allows manufacturing optimization by using cost-effective materials for the bulk insulation while concentrating expensive robust dielectric material only where it provides maximum shorting prevention value.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent uses parameter changes by optimizing the thickness and material properties of the dielectric substrate to achieve the minimum required insulation performance. By carefully selecting dielectric strength, thickness, and material composition parameters, the design achieves adequate shorting prevention with the thinnest possible robust dielectric layer, reducing material costs while maintaining reliability.

Inventive Principle:
Principle #35Parameter changes

3Force

If electrode patterns are closely spaced to increase force generation, then force output is improved, but shorting risk increases

Engineering Contradiction:
Improveforce generationVSAvoidshorting risk
Core Design Contradiction:
ForceVSReliability

Solution Approach 1:

The patent applies beforehand cushioning by positioning a robust dielectric substrate between closely spaced electrode patterns before any shorting can occur. This pre-positioned dielectric barrier provides a safety cushion that allows electrodes to be spaced closer for higher force generation while the dielectric substrate prevents breakdown and shorting even under high electric field stress from the close spacing.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

4Length of moving object

If multiple actuator layers are stacked to increase displacement, then displacement capability is improved, but inter-layer shorting risk increases

Engineering Contradiction:
Improvedisplacement capabilityVSAvoidinter-layer shorting
Core Design Contradiction:
Length of moving objectVSReliability

Solution Approach 1:

The patent uses an intermediary approach by introducing robust dielectric substrates as mediator layers between stacked actuator layers. These dielectric substrates act as intermediary barriers that electrically isolate adjacent actuator layers, preventing inter-layer shorting while allowing the layers to be stacked closely together to achieve increased displacement capability through multi-layer configuration.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves higher electric field strength, increased force generation, and stability, with minimal failure modes, allowing for larger displacements and forces without the risk of shorting, and enabling mass production at low costs.

Implementation Method 1

electrostatic forces proportional to the charge accumulation on and electric fields between electrodes due to an applied electric potential

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Implementation Method 2

In repulsive-force actuators, the moveable electrodes repel each other

Methodology Applied
Scientific EffectRepulsive force: Ion Repulsion/Attraction

Implementation Method 3

a first substrate of a first dielectric material having a first transverse thickness and two opposing surfaces

Methodology Applied
Scientific EffectDielectric insulation: Dielectric

Implementation Method 4

the first and second actuator layers are arranged to have a repulsive electrostatic force therebetween during operation

Methodology Applied
Scientific EffectRepulsive electrostatic force: Electrostatics

Data Source

PatentUS10951134B2Repulsive-force electrostatic actuator
Publication Date: 2021.03.16 RGT UNIV OF CALIFORNIA
  • US10951134B2 patent drawing
  • US10951134B2 patent drawing
  • US10951134B2 patent drawing

AI summary

A repulsive-force electrostatic actuator includes a first actuator layer including a first substrate, a first electrode pattern, and a second electrode pattern. The actuator includes a second actuator layer spaced apart from the first actuator layer that includes a second substrate, a third electrode pattern, and a fourth electrode pattern. The actuator includes a voltage source connected to the first, second, third, and fourth electrode patterns such that the first electrode pattern is at an opposite voltage relative to the second, the third electrode pattern is at an opposite voltage relative to the fourth, and the first and second actuator layers are arranged to have a repulsive electrostatic force therebetween. The actuator further includes an actuator frame connected to the first and second actuator layers such that at least a portion of at least one of the first and second actuator layers is movable due to an applied voltage to effect motion to an object.