Resonant Transducer Multi-Layer Shell Segmentation

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Solution Overview

Problem

Resonant transducers face issues with measurement accuracy due to polysilicon layer accumulation and electrode shorting, as well as bending of the shell under high pressure, which affects the resonator's frequency and electric field, leading to increased measurement deviation and reduced accuracy.

Innovation Solution

A resonant transducer design featuring a silicon single crystal substrate with a multi-layer shell structure, including a through-hole with spacers to prevent polysilicon accumulation and shell bending, maintaining a vacuum and reducing contact area between the resonator and the shell, thereby improving signal integrity and measurement accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a conventional resonant transducer design is used, then the device structure is simple, but polysilicon layer accumulation occurs and electrodes short, reducing measurement precision

Engineering Contradiction:

Improvemeasurement accuracyVSAvoiddevice structure

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The shell is divided into multiple segments (first shell segment, second shell segment, third shell segment) that are positioned at different locations around the resonator. This segmentation prevents polysilicon layer accumulation from causing electrode shorting while maintaining structural integrity and measurement precision.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The resonator is introduced as an intermediary element positioned between the electrode and the shell. This intermediary prevents direct contact between the electrode and shell, eliminating the harmful effect of polysilicon accumulation causing electrode shorting while allowing the electrode to function properly for measurement.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Weight of moving object

If the shell is made thin to reduce weight, then the device becomes lighter, but the shell bends under high pressure, affecting resonant frequency and measurement accuracy

Engineering Contradiction:

Improveshell weightVSAvoidmeasurement accuracy

Core Design Contradiction:

Weight of moving objectVSMeasurement precision

Solution Approach 1:

The shell is segmented into multiple parts positioned at different locations, allowing each segment to be optimized for weight reduction while the distributed structure resists bending under pressure, maintaining resonant frequency stability and measurement accuracy.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different portions of the shell structure have different thicknesses and material properties optimized for their specific functions. The shell segments are designed with local quality variations that provide sufficient structural support against pressure-induced bending while minimizing overall weight.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design enhances measurement accuracy by preventing polysilicon accumulation and shell bending, reducing electrode shorting and improving signal-to-noise ratio, while maintaining a stable resonant frequency under varying pressures.

Implementation Method 1

a resonant transducer includes a vacuum chamber, a microscopic resonator disposed in the chamber, and a vibration detector detecting vibrations of the microscopic resonator

Methodology Applied

Scientific EffectResonance: Resonance

Implementation Method 2

a vibration detector detecting vibrations of the microscopic resonator

Methodology Applied

Scientific EffectVibration detection: Vibration

Data Source

PatentUS9865797B2Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer

Publication Date: 2018.01.09 YOKOGAWA ELECTRIC CORP

AI summary

A resonant transducer includes a silicon single crystal substrate, a silicon single crystal resonator disposed over the silicon single crystal substrate, a shell made of silicon, surrounding the resonator with a gap, and forming a chamber together with the silicon single crystal substrate, an exciting module configured to excite the resonator, a vibration detecting module configured to detect vibration of the resonator, a first layer disposed over the chamber, the first layer having a through-hole over the resonator, a second layer disposed over the first layer, the second layer covering a gap being positioned above the through-hole and being communicated with the through-hole, and a third layer covering the first layer and the second layer, and the third layer sealing the gap.