Resonator Terminal Layout for Collective Frequency Adjustment
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Solution Overview
Problem
Conventional resonance device manufacturing methods require time-consuming frequency adjustment for each device after singulation, and integrating coupling wires with resonators leads to productivity issues and potential short-circuits during division.
Innovation Solution
A manufacturing method involving a collective board with power supply terminals and coupling wires formed from metal layers, where the coupling wires extend beyond division lines and are removed before singulation, allowing collective frequency adjustment and preventing short-circuits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If coupling wires are separately formed and connected to terminals, then electrical connection is achieved, but the number of manufacturing steps increases and productivity decreases
Solution Approach 1:
The coupling wire and terminal are merged into a single integrally formed structure. The terminal includes a terminal electrode and a coupling wire portion that extends from the terminal electrode, eliminating the need for separate formation and connection steps while ensuring reliable electrical connection between adjacent resonance devices
2Productivity
If terminals and coupling wire are integrally formed, then manufacturing steps are reduced, but the coupling wire on division line deforms and may cause short-circuit
Solution Approach 1:
The coupling wire portion is extracted as a distinct functional element from the terminal. The terminal includes a terminal electrode and a coupling wire portion that extends from the terminal electrode, allowing the coupling wire to be removed after serving its purpose during collective frequency adjustment, thereby preventing potential short-circuits while maintaining manufacturing efficiency
Solution Approach 2:
The coupling wire portion is formed as part of the terminal structure before the division step, enabling collective frequency adjustment to be performed on multiple resonance devices simultaneously. The coupling wire portion is then removed after serving its temporary function, preventing deformation-related short-circuits in the final product
3Measurement precision
If frequency adjustment is performed on each device after singulation, then individual adjustment is achieved, but time consumption increases
Solution Approach 1:
Multiple resonance devices are electrically connected through coupling wire portions that extend from their respective terminals, enabling collective frequency adjustment to be performed simultaneously on multiple devices through a single probe connection, thereby significantly reducing adjustment time while maintaining individual frequency adjustment capability
Solution Approach 2:
The coupling wire portions serve as intermediary conductors that electrically connect multiple resonance devices to a single probe. This intermediary structure enables efficient collective frequency adjustment by allowing the probe to distribute adjustment signals to multiple devices simultaneously through the coupling wire portions
Data Source
AI summary
A manufacturing method is provided for a resonance device that includes preparing a collective board including first power supply terminals electrically connected to upper electrodes of a plurality of resonators, and a first coupling wire that electrically connects two or more of the first power supply terminals. The method includes dividing the collective board into a plurality of resonance devices. Moreover, the first power supply terminals include a first metal layer and a second metal layer covering the first metal layer. The first coupling wire includes a portion of the first metal layer that extends from a region covered with the second metal layer. The method further includes removing the portion of the first metal layer extending from the region covered with the second metal layer before the dividing the collective board into the plurality of resonance devices.