Reticle Pod Gripping Unit Reducing Wear
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Solution Overview
Problem
Existing reticle pods rely on passive bearing methods that cause wear over time due to continuous contact friction, which is inadequate for long-term reticle stability and protection.
Innovation Solution
A reticle pod with a gripping unit featuring a gripping arm and modules equipped with a case, stopper, and spring unit, allowing for controlled gripping and minimal contact during transport or storage, using a spring unit to restore the stopper's position and reduce friction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If passive bearing method is used to fix the reticle, then the reticle can be held in position, but continuous contact friction causes wear of the reticle or reticle pod over time
Solution Approach 1:
The patent replaces the traditional passive mechanical bearing method with an active gripping mechanism that uses controlled mechanical engagement. The gripping modules with spring units and stoppers provide active holding force only when needed, rather than continuous passive contact, thereby reducing wear while maintaining fixation stability.
Solution Approach 2:
The patent introduces dynamic elements including spring units that can compress and extend, and stoppers that can move between engaged and disengaged positions. This dynamic system allows the reticle to be securely held when required while minimizing contact friction during non-operational periods, resolving the contradiction between stable fixation and wear prevention.
2Object-affected harmful factors
If the reticle pod is closed for storage, then the reticle is protected from external contamination, but the reticle may be damaged due to collision or shaking of the pod
Solution Approach 1:
The patent implements a gripping mechanism that secures the reticle in position before the pod is closed for storage. The spring units and stoppers provide pre-positioning and cushioning forces that prevent the reticle from moving during transport, thereby protecting it from collision damage while maintaining the closed protective environment.
Solution Approach 2:
The gripping modules act as intermediary elements between the reticle and the pod walls. Instead of the reticle directly contacting the pod walls where it could be damaged by shaking, the gripping modules mediate the interaction, providing stable positioning and absorbing mechanical shocks during transport.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively minimizes wear and damage by ensuring controlled and temporary contact, maintaining reticle stability and cleanliness during storage and transfer.
Implementation Method 1
a spring unit connected with the stopper, wherein the spring unit is used to restore a position of the stopper
Data Source
AI summary
This invention discloses a reticle pod and gripping unit thereof. The aforementioned gripping unit comprises a gripping arm and at least two gripping modules. The gripping arm is hold and configured on the reticle pod, and each gripping module is deposed on the end of the gripping arm, passing through the reticle pod. A single gripping module comprises a case, a stopper and a spring unit. The case is configured on and in the reticle pod. The stopper is configured in the case and passes through the reticle pod. The spring unit is connected with the stopper.


