Reticle Pod Backside Static Dissipation and Centering
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Solution Overview
Problem
Current reticle pods fail to provide a continuous static dissipation path for the back side of reticles, leading to static charge accumulation and contamination due to dust absorption, and cannot limit reticle displacement when the outer pod is opened.
Innovation Solution
A reticle pod with an inner pod design featuring conductive retainers and flexible guiding components that establish a full-time electrical conduction path on the back side of the reticle, allowing for static dissipation and automatic positioning without external assistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the outer pod is opened for access, then ease of operation is improved, but the reticle retainer fails to contact the reticle causing displacement and contamination
Solution Approach 1:
The conductive retainers are pre-configured to extend from the back side accommodation space and maintain continuous contact with the reticle's back side before, during, and after outer pod opening. This preliminary positioning ensures the reticle remains secured and centered even when the outer pod is opened for access, preventing displacement and contamination.
Solution Approach 2:
The conductive retainers act as intermediary elements between the back side accommodation space and the reticle, maintaining mechanical contact and electrical conduction regardless of outer pod state. These retainers serve as the mediating force that keeps the reticle properly positioned during operations when the outer pod is opened.
2Object-affected harmful factors
If conductive retainers are added to establish full-time electrical conduction on the back side, then static dissipation is improved, but device complexity increases
Solution Approach 1:
The conductive retainers are designed to perform multiple functions simultaneously: they provide mechanical support to hold the reticle in position, maintain continuous electrical conduction for static dissipation, and enable automatic centering through their elastic deformation. This multi-functionality reduces the need for separate components, thereby limiting the increase in device complexity while achieving comprehensive static dissipation.
Solution Approach 2:
The retainers utilize changes in electrical conductivity parameters through material selection (conductive materials with appropriate resistance values) to enable static dissipation. By adjusting the conductivity parameter of the retainer materials, the system achieves effective static charge dissipation without requiring overly complex structural modifications.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively dissipates static charge on the reticle's back side and prevents contamination by dust, while ensuring the reticle remains centered and secure within the inner pod, even when the outer pod is open.
Implementation Method 1
the multiple conductive retainers form a full-time electrical conduction with the back side of the reticle, accordingly establishing a static dissipation path along the multiple conductive retainers, the inner cover and the inner base
Implementation Method 2
The multiple flexible guiding components are correspondingly disposed on the multiple outer mounting portions, and guide the inner cover and the inner base to position without relative displacement
Data Source
AI summary
A reticle pod with backside static dissipation has an inner pod defining an accommodation space for a reticle. Multiple flexible guiding components are correspondingly disposed on multiple outer mounting portions of the inner pod in order to guide an inner cover and an inner base of the inner pod to position without relative displacement. Multiple conductive retainers are correspondingly arranged in the accommodation space to push against a backside of the reticle and form a full-time electrical conduction with the back side of the reticle, so as to establish a static dissipation path by the conductive retainers and the inner pod. Meanwhile, with the conductive retainers pushing against the reticle as well as the flexible guiding components providing the inner cover and the inner base with automatic position guiding, the reticle is automatically pushed and positioned to a center position of the inner base.