Retractable Guiding Member for Substrate Positioning and Tape Application
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Solution Overview
Problem
Substrate tables with conical positioning pins hinder the application of tape to substrates, preventing accurate positioning and chip manufacturing due to warping issues.
Innovation Solution
A substrate table with a guiding member that projects to position the substrate and retracts during tape application, allowing for accurate positioning and cutting of substrates without waste, using a substrate table with a substrate stage and guiding members that project and retract to accommodate warped substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conical positioning pins are used to position and suppress warping of substrates, then positioning accuracy is improved, but tape application becomes impossible
Solution Approach 1:
The positioning pin is designed to change its shape dynamically: it projects in a conical form during substrate placement to correct warping and ensure accurate positioning, then retracts into a cylindrical form to allow tape application without interference. This dynamic transformation resolves the contradiction between positioning accuracy and tape application capability.
Solution Approach 2:
The positioning pin's function is segmented into two distinct phases: a positioning phase where the conical shape corrects substrate warping, and a tape application phase where the pin retracts to a cylindrical shape. This segmentation allows each function to be optimized independently while resolving the conflict between the two requirements.
2Manufacturing precision
If conical positioning pins are used to correct substrate warping, then substrate positioning is improved, but the positioning pins become a hindrance during tape application
Solution Approach 1:
The positioning pin transforms from a conical shape that interferes with tape application to a cylindrical shape that allows smooth tape application. This dynamic shape change eliminates the harmful interference effect while preserving the substrate positioning capability during the placement phase.
Solution Approach 2:
The geometric parameters of the positioning pin are changed between operational phases: the pin transitions from a conical geometry (with a narrowed substrate stage side) to a cylindrical geometry. This parameter change allows the pin to fulfill its positioning function while eliminating interference during tape application.
Data Source
AI summary
A substrate table used for manufacturing a chip is provided. The substrate table includes a substrate stage, a substrate placement surface formed on the substrate stage, and on which a substrate is placed, and a guiding member that can project and retract from the substrate placement surface. The guiding member positions the substrate when the guiding member is at a projected position abutting an edge portion of the substrate placed on the substrate placement surface, and the guiding member retracts at a time of applying a tape to the substrate.