RF Coil Ion Source Layout for Breakdown Clearance Control
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Solution Overview
Problem
The existing ion source discharge apparatuses are prone to breakdown due to uncontrollable distances between the discharge chamber and the conductive connecting parts, leading to increased production costs.
Innovation Solution
The anti-breakdown ion source discharge apparatus includes a discharge chamber sleeved with an ion source chamber, with a radio-frequency coil fixed on a coil support base and conductive connecting parts installed from the outside of the radio-frequency coil, ensuring stable and adjustable distances to prevent breakdown.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If thin and unfixed copper sheets are used for electrical connection, then the device complexity is reduced, but the distance between the discharge chamber and the copper sheets becomes uncontrollable leading to breakdown
Solution Approach 1:
The patent transforms the static, fixed-position copper sheets into a dynamic system where the conductive connecting parts can be adjusted vertically along the radio-frequency coil. This allows the distance between the discharge chamber and conductive parts to be controlled and adjusted according to different process requirements, while the insulating support structures ensure the system remains stable and prevents unwanted contact that would cause breakdown.
Solution Approach 2:
The patent introduces insulating support structures (insulating supports and insulating clamps) as intermediary elements between the conductive connecting parts and the radio-frequency coil. These intermediaries serve dual functions: they provide mechanical support to maintain stable distances, and they provide electrical insulation to prevent breakdown, thus resolving the contradiction between simplicity and reliability.
2Volume of moving object
If the distance between the discharge chamber and the conductive connecting parts is reduced, then the device size is minimized, but the discharge chamber breaks down under long-term electric field effect
Solution Approach 1:
The insulating support structures act as intermediary elements that enable the system to achieve compact dimensions while maintaining sufficient electrical clearance. The insulating supports and clamps allow the conductive connecting parts to be positioned close to the discharge chamber for miniaturization, while simultaneously providing the necessary electrical insulation to prevent breakdown under long-term electric field effects.
Solution Approach 2:
The patent changes the critical parameter from a fixed, minimal distance to an adjustable distance that can be optimized for both compact size and reliability. By allowing vertical adjustment of the conductive connecting parts along the radio-frequency coil, the system can achieve the minimum safe distance required to prevent breakdown while minimizing overall device size.
3Manufacturing precision
If adjustable conductive connecting parts are used, then the distance control is improved, but the device complexity increases due to additional insulating components
Solution Approach 1:
The insulating support structures serve as simple yet effective intermediary elements that provide both mechanical support and electrical insulation. Rather than complex adjustment mechanisms, the patent uses straightforward insulating supports and clamps that can be easily installed and adjusted, achieving precise distance control without significantly increasing device complexity.
Solution Approach 2:
The patent employs thin insulating supports and clamps that provide sufficient electrical insulation and mechanical support while occupying minimal space. These thin-film-like insulating components achieve the dual function of distance control and electrical isolation without adding substantial structural complexity to the overall device.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents breakdowns by maintaining stable distances between the discharge chamber and the conductive connecting parts, reducing production costs and enhancing the reliability of the ion source discharge apparatus.
Implementation Method 1
the gas is ionized by the radio-frequency power supply to form plasma in the discharge chamber
Data Source
AI summary
An anti-breakdown ion source discharge apparatus includes a discharge chamber, a coil support, an upper insulation fixing block, a discharge component and an ion source chamber. The discharge component includes a radio-frequency coil, a lower conductive connector and an upper conductive connector. The radio-frequency coil is fixed on a coil support base; the coil support base is clamped on an inner wall of the bottom of the ion source base; the coil support is along the circumference of the coil support base; the radio-frequency coil passes through the coil support; the upper conductive connector passes by the radio-frequency coil and the coil support base from the outside of the radio-frequency coil and extends into the bottom of the discharge chamber; and the upper insulation fixing block is sleeved over the upper conductive connector and is fixed on the inner wall of the bottom of the ion source chamber.