De-embedding Accuracy Test Structure for RF Devices
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Solution Overview
Problem
Existing de-embedding methods for RF devices are inadequate in evaluating de-embedding accuracy and applicable frequency range, particularly at high frequencies, as they rely on simple parasitic element equivalent circuit models that become ineffective and focus on theoretical embedded steps without practical accuracy evaluation.
Innovation Solution
A test structure and method involving a target device, reference device, parallel test structure, and cascade test structure are used to judge de-embedding accuracy by combining S-parameter testing and calculations, allowing for the evaluation of de-embedding accuracy and frequency range through comparison of test performance parameters and error analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional de-embedding methods are used, then de-embedding can be performed, but de-embedding accuracy cannot be evaluated and applicable frequency range cannot be determined
Solution Approach 1:
The patent introduces a reference device as an intermediary element to enable accuracy evaluation. The reference device with known characteristics serves as a mediator between the test system and the de-embedding process, allowing the system to verify and evaluate the accuracy of de-embedding results without directly measuring the DUT alone.
Solution Approach 2:
The patent creates a copy of the test structure (reference device test structure) with known characteristics that mirrors the target device test structure. This copy is used to validate the de-embedding process by comparing measured results against known reference values, enabling accuracy assessment.
2Ease of manufacture
If simple parasitic element equivalent circuit models are used, then de-embedding can be performed, but accuracy is insufficient at high frequencies
Solution Approach 1:
The patent transitions from static simple parasitic models to dynamic multi-structure testing that adapts to different frequency ranges. By introducing multiple test structures (target device, reference device, parallel, and cascade configurations), the system dynamically selects and combines appropriate measurement approaches based on frequency requirements, maintaining accuracy across wide frequency ranges.
Solution Approach 2:
The patent combines multiple test structures and measurement methods into a composite testing approach. Rather than relying on a single simple model, it integrates results from target device test, reference device test, parallel test structure, and cascade test structure to create a comprehensive de-embedding solution that maintains accuracy at high frequencies.
3Ease of operation
If only target device test structure is used, then testing is simple, but reliability of de-embedding accuracy judgment is insufficient
Solution Approach 1:
The patent segments the testing process into multiple independent test structures: target device test structure, reference device test structure, parallel test structure, and cascade test structure. Each structure serves a specific validation purpose, allowing the system to isolate and evaluate different aspects of de-embedding accuracy, thereby improving reliability through divided verification.
Solution Approach 2:
The patent implements feedback mechanisms by comparing measured results from multiple test structures against expected theoretical relationships. The parallel and cascade test structures provide feedback paths that validate whether de-embedding results are consistent across different configurations, enhancing the reliability of accuracy judgments.
Data Source
AI summary
The present invention discloses a test structure and a method for judging the de-embedding accuracy of RF devices, which comprises testing the S parameters of a target device test structure, an introduced device test structure and an auxiliary test structure, respectively. Then calculating de-embedding S parameters of the target device test structure and the introduced device test structure according to the above-tested results, respectively. Finally, calculating performance parameters of the target device test structure according to the above-calculated de-embedding S parameters. So, the accuracy of the de-embedding method is determined by comparing the consistency of the performance parameters. The present invention can directly judge the de-embedding accuracy and the applicable frequency range of a given de-embedding method by analyzing the testing data. Further, the using of the parallel test structure and the cascade test structure together can increase the reliability of the judgment results.