Monolithic RF System Integration via Segmented Sub-Assemblies

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Solution Overview

Problem

Conventional RF systems operating at high frequencies (10 GHz to 300 GHz) face limitations due to low power handling capability and performance degradation with increasing frequency, particularly in thin film technology-based designs.

Innovation Solution

A method involving the formation of RF devices using sub-assemblies with conductive and sacrificial layers deposited on substrates to create peripheral walls and signal processing components, which are then joined to form a monolithically integrated RF circuit with enhanced power handling and frequency performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If thin film technology is used for conventional filters and switching devices at high frequencies, then the devices can be manufactured with existing processes, but the power handling capability is low and performance degrades as frequency increases

Engineering Contradiction:
ImprovemanufacturabilityVSAvoidpower handling capability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The RF system is divided into multiple functional sub-assemblies (filter sub-assembly, switching sub-assembly, etc.) that can be manufactured separately using thin film technology and then integrated. This allows each sub-assembly to be optimized for its specific function while maintaining overall system manufacturability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention combines thin film technology with three-dimensional microstructure fabrication techniques to create hybrid structures. The peripheral walls and ledges provide mechanical support and signal confinement, while thin film components provide filtering and switching functions, creating a composite system that overcomes the limitations of pure thin film technology.

Inventive Principle:
Principle #40Composite materials

2Ease of manufacture

If thin film technology is used for conventional filters and switching devices, then manufacturing is simplified, but performance degrades as frequency increases to 300 GHz

Engineering Contradiction:
ImprovemanufacturabilityVSAvoidfrequency performance
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

Different regions of the device have different structural properties optimized for their specific functions. The peripheral walls provide signal confinement at high frequencies, while the thin film components provide frequency-selective filtering. This local optimization allows the system to maintain performance at frequencies up to 300 GHz.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The invention transitions from two-dimensional thin film structures to three-dimensional microstructures by adding vertical elements (peripheral walls extending from substrate surfaces). This dimensional enhancement provides better signal confinement and reduces parasitic effects at high frequencies while maintaining compatibility with thin film manufacturing processes.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If three-dimensional microstructures are formed by sequential build processes, then power handling capability is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvepower handling capabilityVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The three-dimensional structure is segmented into modular sub-assemblies that can be manufactured independently using standardized processes. Each sub-assembly contains specific functional components (filters, switches, connectors) that are integrated through controlled deposition and joining operations, reducing overall manufacturing complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Sub-assemblies are pre-manufactured and pre-tested before final integration. The controlled deposition process prepares surfaces and structures in advance, and sacrificial materials are pre-positioned to enable subsequent assembly steps. This preliminary preparation simplifies the final integration process.

Inventive Principle:
Principle #10Preliminary action

4Area of stationary object

If multiple sub-assemblies are integrated monolithically, then the system footprint is reduced, but manufacturing precision requirements increase

Engineering Contradiction:
Improvesystem footprintVSAvoidalignment precision
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

Multiple functional sub-assemblies are nested within a common three-dimensional housing structure formed by peripheral walls. The housing provides mechanical alignment references and positioning features that simplify the integration process. Sub-assemblies are positioned within the housing and joined together, achieving compact integration with controlled precision requirements.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The housing structure acts as an intermediary element that facilitates the integration of multiple sub-assemblies. It provides mechanical support, alignment references, and positioning features that reduce the precision requirements for direct sub-assembly-to-sub-assembly alignment. The housing mediates the integration process by providing a common reference framework.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables the construction of RF devices with improved power handling and reduced performance degradation at high frequencies, providing a more efficient and effective RF system with a small footprint.

Implementation Method 1

depositing on a first surface of a first substrate a first plurality of layers including at least one layer each of a conductive material and a sacrificial material

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Data Source

PatentUS9756737B2Method of making a monolithically integrated RF system
Publication Date: 2017.09.05 HARRIS CORP
  • US9756737B2 patent drawing
  • US9756737B2 patent drawing
  • US9756737B2 patent drawing

AI summary

Radio frequency system (250) which includes a first and second sub-assembly (100, 200), each formed of a plurality of layers of conductive material (504, 508, 516) disposed on a substrate (102) and arranged in a stack. The stacked layers form signal processing components (108, 110) and at least one peripheral wall (104, 204) surrounding a walled area (118, 218) of each substrate. The second sub-assembly is positioned on the first sub-assembly with a first walled area of a first substrate aligned with a second walled area of a second substrate.