Robot Arm Heat Choke and Rotary Thermal Coupling
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Solution Overview
Problem
Existing robots operating in high-temperature environments, such as semiconductor wafer processing systems, face challenges in managing heat transfer effectively, leading to excessive temperature rises that can cause thermal expansion issues, reduced component lifespan, and damage to sensors and electronics.
Innovation Solution
The implementation of a robot arm with a heat choke and rotary thermal couplings having interleaved members, which are rotatable relative to each other, to manage heat transfer between links and the end effector, combined with the use of heat pipes to enhance thermal conductivity and control temperature gradients.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the robot arm operates in high-temperature environments to handle hot payloads, then the robot can perform substrate processing tasks, but the temperature of robot arm components increases causing thermal expansion and reduced component lifespan
Solution Approach 1:
The robot arm is divided into multiple links (first link, second link, third link) with distinct thermal management zones. Each link can be independently cooled or insulated, allowing selective temperature control without affecting the entire arm structure.
Solution Approach 2:
Thermal barriers and heat chokes are introduced as intermediary elements between the end effector and the robot arm links. These intermediaries block heat transfer from the hot substrate support area to the cooler sections, protecting sensitive components while allowing the end effector to maintain high temperature for substrate processing.
2Stability of the object's composition
If heat transfer is allowed to occur naturally in the robot arm, then thermal equilibrium is achieved, but thermal expansion issues and damage to sensors and electronics occur
Solution Approach 1:
Thermal barriers and heat chokes serve as intermediary elements that control heat flow paths. They allow thermal equilibrium to be maintained in protected zones while preventing excessive heat from reaching sensitive components, thus preserving component lifespan without compromising overall thermal stability.
Solution Approach 2:
Different regions of the robot arm are assigned different thermal properties. The end effector and substrate support area are designed to withstand high temperatures, while the links and joints are protected with thermal barriers. This local differentiation allows each zone to maintain appropriate thermal conditions for its specific function.
3Reliability
If thermal insulation is applied to protect components from heat, then component lifespan is extended, but heat management efficiency decreases
Solution Approach 1:
The robot arm is segmented into multiple thermal zones with selective insulation applied only where necessary. Thermal barriers are placed at specific locations (between links, at joint interfaces) rather than covering the entire structure, maintaining heat management efficiency while protecting critical components.
Solution Approach 2:
Heat chokes and thermal barriers are positioned as intermediary elements at strategic locations where heat transfer would otherwise cause damage. These intermediaries block harmful heat paths while allowing efficient heat dissipation in non-critical areas, optimizing the balance between component protection and thermal efficiency.
4Temperature
If the robot arm structure is modified to include heat chokes and rotary thermal couplings, then temperature control is improved, but device complexity increases
Solution Approach 1:
The rotary thermal coupling integrates both mechanical rotation and thermal management functions into a single component. The interleaved members serve dual purposes: transmitting rotational motion between links and providing thermal barrier functionality, thereby reducing overall device complexity despite the added temperature control capability.
Solution Approach 2:
The rotary thermal coupling acts as a multi-functional element that simultaneously provides mechanical coupling for rotation and thermal insulation. This universal component eliminates the need for separate mechanical joints and thermal barriers, simplifying the overall structure while achieving improved temperature control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces the temperature of the robot arm components, mitigating thermal expansion issues and extending the lifespan of bearings and electronics, while maintaining efficient operation in high-temperature environments.
Implementation Method 1
the end effector comprises a heat choke located between a substrate support area of the end effector and the second rotatable connection
Implementation Method 2
the rotary thermal coupling at the second rotatable connection assists to increase heat transfer from the end effector to the second link
Implementation Method 3
combined with the use of heat pipes to enhance thermal conductivity and control temperature gradients
Data Source
AI summary
An apparatus including a robot drive; and a robot arm connected to the robot drive, where the robot arm includes a first link connected to the robot drive, a second link rotatably connected to the first link at a first rotatable connection, and an end effector rotatably connected to the second link at a second rotatable connection. The end effector includes a heat choke located between a substrate support area of the end effector and the second rotatable connection. At least one of the first rotatable connector or the second rotatable connection includes a rotary thermal coupling having interleaved members which are rotatable relative to each other.