Robot Arm Trajectory Overlap for Interference-Free Substrate Handling
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Solution Overview
Problem
Existing robot systems for semiconductor manufacturing face challenges in efficiently conveying substrates like wafers across various operation regions within a housing, particularly due to interference issues and limited accessible regions.
Innovation Solution
The robot system incorporates a unique design with a first base and movable portions that allow for a wider operational range by overlapping the trajectories of its arms, avoiding interference, and shifting key rotation shafts to accommodate narrower spaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of moving object
If the robot arms are designed to overlap trajectories to avoid interference, then the operational range is widened, but the device complexity increases
Solution Approach 1:
The patent applies dimensionality change by overlapping the trajectories of the first and second arms in the vertical plane while keeping their horizontal projections separate. This allows both arms to operate in the same horizontal space without interference by utilizing the vertical dimension for trajectory differentiation, thereby widening the operational range without increasing device complexity
Solution Approach 2:
The patent employs asymmetry in the trajectory design where the first arm follows a different vertical path than the second arm. Specifically, the first arm moves downward first then upward, while the second arm moves upward first then downward, creating asymmetric motion patterns that prevent interference while maintaining compact device structure
2Length of stationary object
If key rotation shafts are shifted to accommodate narrower spaces, then the housing width is reduced, but the manufacturing precision requirements increase
Solution Approach 1:
The patent applies local quality by strategically positioning the first and second key rotation shafts at asymmetric locations within the housing. The first key rotation shaft is positioned closer to the first side surface while the second key rotation shaft is positioned closer to the second side surface, allowing optimized space utilization in different regions of the housing and reducing overall width while maintaining manufacturing feasibility
3Adaptability or versatility
If the robot is designed for wider operational range, then the flexibility in semiconductor manufacturing is enhanced, but the interference between components increases
Solution Approach 1:
The patent resolves the interference issue by utilizing the vertical dimension for trajectory differentiation. The first arm's trajectory includes a downward movement phase followed by upward movement, while the second arm moves upward first then downward. This vertical phase differentiation allows both arms to access the same horizontal operation regions without colliding, thereby enhancing flexibility while preventing interference
Data Source
AI summary
Provided is a robot arranged in a housing having a front wall having a plurality of openings and a back wall facing the front wall and having an opening, the robot including: a first movable portion; a second movable portion which has a third arm and a hand; an information storage unit which stores cooperative operation-related information; a cooperative operation selection unit selects, based on a position of an access target of access by the hand and the cooperative operation-related information stored in the information storage unit, whether to cause the hand to access the access target by an cooperative operation of the third arm and the hand or to cause the hand to access the access target by an cooperative operation of the third arm, the hand, and the first movable portion; and a control unit which controls the first movable portion and the second movable portion.