Robot Arm Trajectory Overlap for Wafer Handling
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Solution Overview
Problem
Existing robot systems for semiconductor manufacturing face challenges in efficiently conveying substrates like wafers across a wide range without increasing costs or complexity.
Innovation Solution
The robot system incorporates a unique design with a first base, first and second movable portions, and a control unit, allowing for efficient movement and access to substrates through overlapping arm trajectories and strategically positioned rotation shafts, enabling wider operational ranges and reduced interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the robot uses conventional arm structures for substrate conveyance, then the structure is simple and cost-effective, but the operational range is limited and interference occurs between arms
Solution Approach 1:
The robot arm is divided into multiple independent movable portions (first movable portion with first arm, second movable portion with second arm) that can operate independently. Each movable portion has its own rotation shafts and control mechanisms, allowing separate control and optimization of their trajectories to avoid interference while expanding the overall operational range.
Solution Approach 2:
The patent introduces multiple rotation shafts (first rotation shaft, second rotation shaft, third rotation shaft) that enable movement in multiple dimensions. The first arm can rotate around the first rotation shaft, the second arm around the second rotation shaft, and the second base around the third rotation shaft, creating three-dimensional movement capability that expands operational range without proportionally increasing structural complexity.
2Adaptability or versatility
If the robot increases the number of rotation shafts and movable portions to expand operational range, then the operational range increases, but the device complexity and cost increase
Solution Approach 1:
The patent combines multiple functions into integrated components. The second base serves both as a support structure and as a movable portion that can rotate around the third rotation shaft. The control unit integrates the control of all movable portions, coordinating their movements to achieve complex trajectories without requiring separate control systems for each component.
Solution Approach 2:
The rotation shafts are designed to serve multiple purposes. The first rotation shaft enables the first arm to move, and the same shaft structure is used for the second arm's rotation. The second base serves as both a structural support and an active movable portion. This multi-functionality reduces the total number of separate components needed while maintaining expanded operational range.
Data Source
AI summary
Provided is a robot including: a first movable portion which has a first arm having a proximal end side connected to a first base and a second arm having a proximal end side connected to a distal end side of the first arm; a second movable portion which has a second base having a proximal end side connected to a distal end side of the second arm, a third arm having a proximal end side connected to a distal end side of the second base, and a hand having a proximal end side connected to a distal end side of the third arm and holding a wafer; and a control unit, and a width, in a direction perpendicular to the vertical plane, of a trajectory of the first movable portion falls within a width, in the direction perpendicular to the vertical plane, of a trajectory of the wafer.