Robot Belt-Drive System for Lightweight Substrate Handling
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Solution Overview
Problem
Robots used for substrate transport in semiconductor processing face challenges related to weight, size, complexity, and range, which affect performance, reliability, throughput, longevity, and maintenance costs.
Innovation Solution
A robot design incorporating a floating Z platform with a shaft and timing belts to enable Z, radial, and angular motions, allowing for lightweight construction and unrestricted angular rotation without mechanical encumbrances, synchronized by motors and motion conversion assemblies to optimize motion control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If traditional robot designs with mechanical encumbrances are used, then structural support is provided, but angular rotation is restricted and weight increases
Solution Approach 1:
The patent removes traditional mechanical encumbrances such as cables, hoses, and rigid mechanical linkages that restrict angular rotation. By extracting these components, the robot achieves unrestricted continuous rotation capability while significantly reducing overall system weight.
Solution Approach 2:
The patent employs flexible timing belts instead of rigid mechanical linkages. These thin, flexible belts can accommodate unlimited angular rotation while providing the necessary mechanical coupling, thereby resolving the contradiction between rotation range and weight.
2Measurement precision
If more motors and motion conversion assemblies are added, then motion control precision is improved, but device complexity increases
Solution Approach 1:
The patent designs motors and motion conversion assemblies that perform multiple functions. For example, the motion conversion assemblies serve both as speed reducers and as positional synchronization mechanisms, thereby achieving precise motion control without proportionally increasing system complexity.
Solution Approach 2:
The patent combines multiple functions into integrated components. The motion conversion assemblies merge gear reduction, belt tensioning, and positional coupling functions into single units, reducing the total number of discrete components while maintaining control precision.
3Speed
If lightweight construction is implemented, then operational speed increases, but structural strength may be compromised
Solution Approach 1:
The patent utilizes composite material constructions in the robot arm and structural components. These composites provide high strength-to-weight ratio, enabling lightweight design that maintains sufficient structural strength for high-speed operations without compromising load-bearing capacity.
Solution Approach 2:
The robot structure is divided into modular segments connected by precision joints. This segmentation allows each component to be optimized for minimal weight while maintaining local strength requirements, and enables faster acceleration and deceleration due to reduced moment of inertia.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution results in a lightweight robot with increased operational speeds, reduced wear, and the ability for endless angular rotation, enhancing performance, reliability, and reducing maintenance costs while maintaining precise motion control.
Implementation Method 1
a first timing belt coupled to the output shaft of the first motor and to the shaft to thereby transfer motion of the first motor to the robot arm by way of said shaft, and a second timing belt coupled to the output shaft of the second motor and to the shaft to thereby transfer motion of the second motor to the shaft
Data Source
AI summary
A substrate handling robot having a robot body and a robot arm with an end effector is configured to exhibit angular (θ), radial (R) and Z motion. A pair of coaxial shafts link the robot arm to respective motors dedicated to angular (θ) and radial (R) motions. The motors are stationarily mounted with respect to the robot body. The shafts are rotatably supported by a floating platform which is motivated in the Z direction by a third motor also stationarily mounted with respect to the robot body. The third motor is coupled to the platform by a Z motion linkage. The first and second motors are coupled to the coaxial shafts by angular and radial motion linkages each of which includes primary and secondary timing belts whose relative motions are synchronized with the Z motion linkage to achieve controllable independent angular (θ), radial (R) and Z motions in a simple, light-weight package.