Horizontal Articulated Robot Bevel Gear Motor Alignment
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional horizontal articulated robots used for transferring semiconductor wafers face challenges in precise installation due to the need for precise horizontal movement and the limitations of the EFEM housing space, leading to increased installation time and difficulty in reducing motor size and backlash in the power-transmitting path.
Innovation Solution
A horizontal articulated robot design featuring a motor with its output shaft axis aligned horizontally, utilizing a Harmonic Drive wave-motion gearing device and a level attached to the main body portion to adjust the arm's inclination, allowing for precise horizontal movement and reducing motor size and backlash.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional horizontal articulated robots are used with motors arranged inside arm portions, then the robot can transfer semiconductor wafers, but the motor size cannot be reduced and backlash in the power-transmitting path cannot be minimized due to space constraints and alignment requirements
Solution Approach 1:
The patent changes the arrangement dimension of the motor from inside the arm portion to the base portion, allowing the output shaft axis to be aligned horizontally without spatial constraints. This dimensional repositioning enables precise power transmission while reducing motor size and backlash.
Solution Approach 2:
The patent introduces a bevel gear mechanism as an intermediary between the motor and the arm rotation mechanism. The bevel gear transmits rotational force from the horizontally-aligned motor output shaft to the arm, enabling precise movement while maintaining compact motor dimensions and minimizing backlash.
2Adaptability or versatility
If the robot is installed in the EFEM housing with limited space, then the robot can operate within the housing, but the installation time increases and the ability to reduce motor size is constrained
Solution Approach 1:
By repositioning the motor to the base portion with horizontal output shaft alignment, the patent creates a more efficient spatial arrangement that reduces installation complexity and time while maintaining adaptability to the EFEM housing constraints.
Solution Approach 2:
The patent changes the motor arrangement parameters (position and orientation) to optimize both the fitting within the EFEM housing and the installation process, thereby reducing installation time while maintaining adaptability.
3Ease of operation
If bevel gears are used to transmit power from the motor to the arm, then the motor can be aligned horizontally, but the gear meshing precision must be maintained to reduce backlash
Solution Approach 1:
The bevel gear serves as an intermediary mechanism that translates the horizontally-aligned motor output into arm rotation. The gear design and arrangement are optimized to maintain precise meshing while allowing easy motor alignment, thereby reducing backlash through proper geometric configuration.
Solution Approach 2:
The patent optimizes the bevel gear parameters (pitch, pressure angle, tooth profile) to achieve precise meshing that minimizes backlash while maintaining ease of motor alignment. The gear geometry is specifically designed to compensate for potential misalignments and reduce backlash effects.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables faster and more precise installation of the robot with reduced motor size and backlash, improving the efficiency of semiconductor wafer transfer operations.
Implementation Method 1
utilizing a Harmonic Drive wave-motion gearing device
Implementation Method 2
a level attached to the main body portion to adjust the arm's inclination
Data Source
AI summary
A horizontal articulated robot may include a hand; an arm having at least two arm portions including a supporting-arm portion to which said hand is rotatably joined and a supported-arm portion to which the base end of said hand-side arm portion is rotatably joined; a main body portion; and a rotation mechanism structured to rotate said supported-arm portion. The rotation mechanism may include a motor which is arranged such that an axial direction of an output shaft of the motor coincides with a horizontal direction; a Harmonic Drive (registered trade mark) wave-motion gearing device structured to reduce the power of said motor; a first bevel gear coupled to said output shaft; and a second bevel gear coupled with a wave generator of said Harmonic Drive (registered trade mark) wave-motion gearing device and which meshes with said first bevel gear.