Robot Calibration via Non-Contact Target Detection
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Solution Overview
Problem
Current robot calibration systems face challenges in accurately determining the positional relationship between a robot and a substrate support, leading to discrepancies that affect the precision of substrate transfer and positioning.
Innovation Solution
A robot system equipped with a sensor on its hand that detects a target in a non-contact manner, using a first detector to align and detect the target's position along one direction and a second detector to move and detect the target's position along a perpendicular direction, allowing for precise calibration of the robot's position relative to the substrate support.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a robot calibration apparatus uses a target object with black and white areas and a sensor to determine position, then calibration can be performed, but the system complexity increases and the process becomes more difficult to operate
Solution Approach 1:
The patent extracts the calibration target from the substrate support and places it on a separate movable platform. This allows the target to be independently positioned and removed without affecting the substrate support structure, thereby simplifying the overall system while maintaining calibration precision.
Solution Approach 2:
The patent introduces a movable platform as an intermediary carrier between the calibration target and the robot hand sensor. This platform enables precise positioning of the target relative to the sensor without requiring complex integration into the substrate support system.
2Productivity
If the robot transfers substrates between substrate supports, then productivity increases, but positional relationship discrepancies affect transfer precision
Solution Approach 1:
The patent performs calibration before the substrate transfer operation. By pre-determining the positional relationship between the robot hand and substrate support using the calibration target, the system ensures accurate substrate transfer without requiring continuous adjustment during the transfer process.
Solution Approach 2:
The patent uses a sensor on the robot hand to detect the calibration target and feedback this information to the control unit. The control unit then calculates and corrects the positional relationship, ensuring precise substrate transfer based on the measured and corrected positions.
3Device complexity
If calibration is performed using existing substrate supports, then device complexity is reduced, but the calibration process becomes difficult to operate and less accurate
Solution Approach 1:
The patent segments the calibration function from the substrate support system by using a separate movable platform. This allows the calibration target to be independently handled and positioned, making the calibration operation simpler and more flexible without requiring modification of the substrate support structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy and accurate calibration of the robot's position, improving the precision of substrate transfer and reducing positional relationship discrepancies, thereby enhancing the reliability of the robot system's operations.
Implementation Method 1
a sensor provided on the hand to detect the target in a non-contact manner while facing the target
Data Source
AI summary
A robot system includes a robot that supports and transfers a substrate W using a hand, a target capable of being placed instead of the substrate, a sensor provided on the hand to detect the target in a non-contact manner while facing the target a first detector that detects a position of the target in the first direction based on a detection result of the sensor facing the target long the first direction and a position of the sensor, and a second detector that controls the robot to move the sensor along a second direction perpendicular to the first direction, and detects a position of the target in the second direction based on a change in the detection result of the sensor due to movement along the second direction and the position of the sensor.