Robot End Effector Displacement Sensing Under Vibration
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing robotic transfer methods in semiconductor and liquid crystal display manufacturing face challenges in monitoring displacement distortion without damaging products, particularly due to vibration issues with contact-based sensors.
Innovation Solution
A non-contact displacement sensor is used to measure and correct displacement distortion in robots by fusing data with vibration sensors, allowing for real-time data transmission and adjustment without product damage, and stopping the robot when distortion exceeds predetermined limits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a contact-based vibration sensor is used to detect displacement distortion, then measurement capability is improved, but product damage risk increases
Solution Approach 1:
The patent replaces contact-based mechanical vibration sensors with non-contact displacement sensors (such as laser sensors or optical sensors) to detect end effector displacement. This substitution eliminates mechanical contact with the product, thereby preventing product damage while maintaining the ability to detect displacement distortion through optical fields instead of mechanical contact.
Solution Approach 2:
The patent introduces an intermediary optical field (laser beam or optical signal) between the sensor and the end effector to transmit measurement information without physical contact. The optical field acts as a mediator that carries displacement information from the end effector to the sensor without requiring direct mechanical contact, thus avoiding product damage.
2Object-affected harmful factors
If a laser sensor is used to check displacement distortion, then non-contact measurement is achieved, but measurement accuracy deteriorates due to vibration
Solution Approach 1:
The patent merges the functions of multiple sensors to achieve both non-contact measurement and vibration compensation. Specifically, it combines non-contact displacement sensors (for position measurement) with contact-based vibration sensors (for vibration detection) or uses multiple non-contact sensors to simultaneously measure both displacement and vibration characteristics, thereby overcoming the limitations of each individual sensor type.
Solution Approach 2:
The patent implements feedback mechanisms where vibration data from vibration sensors is used to compensate for measurement errors in displacement measurements. The system continuously monitors vibration and adjusts the displacement measurement calculations in real-time to compensate for vibration-induced errors, thereby maintaining measurement accuracy despite the presence of vibration.
3Reliability
If continuous monitoring is implemented to detect displacement distortion, then reliability is improved, but system complexity increases
Solution Approach 1:
The patent implements self-service monitoring where the robot system automatically detects its own displacement distortion using integrated sensors and autonomously determines whether correction is needed. The system performs self-diagnosis and can trigger automatic correction routines or alert operators, eliminating the need for external manual monitoring and reducing overall system complexity despite continuous monitoring capabilities.
Solution Approach 2:
The patent performs preliminary calibration and baseline establishment during system setup, storing reference data for normal operation. This preliminary action allows the continuous monitoring system to compare real-time measurements against pre-established baselines, simplifying the monitoring logic and reducing computational complexity during actual operation while maintaining high reliability through continuous comparison.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method enables precise monitoring and correction of displacement without product damage, reducing equipment failures and resource consumption by analyzing displacement and vibration correlations.
Implementation Method 1
checking a normal position according to a robot's motion range through the non-contact displacement sensor installed horizontally to an end effector of the robot; measuring displacement with respect to the end effector to obtain displacement data
Implementation Method 2
obtaining vibration data through a vibration sensor coupled to the robot
Data Source
AI summary
The present invention discloses a robot control method using a non-contact displacement sensor, and an apparatus thereof. The robot control method using a non-contact displacement sensor may comprise steps of: checking a normal position according to a robot's motion range through the non-contact displacement sensor installed horizontally to an end effector of the robot; measuring displacement with respect to the end effector to obtain displacement data when a product is transferred by the robot; obtaining vibration data through a vibration sensor coupled to the robot; checking whether an abnormal state exists using the obtained data; and transmitting an adjustment value to correct displacement distortion of the robot when the robot is confirmed to be in the abnormal state.


