Robot Auto-Zeroing via Laser Detection
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Solution Overview
Problem
Existing zeroing methods for adjusting the zero posture of connection members in semiconductor processing robots are prone to detection errors and require manual intervention, which can degrade cleanliness and increase adjustment time in sensitive environments.
Innovation Solution
A robot with an auto-zeroing function using a light emitting unit and light receiving unit to adjust the reference posture to zero posture using a laser beam, eliminating the need for manual operation and improving accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a jig pin and through holes method is used for zeroing, then the zero posture can be adjusted, but detection errors occur due to size variations of the through holes and notched portion
Solution Approach 1:
The patent replaces the mechanical jig pin insertion method with an optical laser beam system. Instead of using physical through holes and a jig pin that are subject to manufacturing tolerances, the invention uses a laser beam that can be precisely directed and detected, eliminating the detection errors caused by variations in hole sizes and notched portions.
Solution Approach 2:
The patent creates an optical copy or representation of the zero posture detection mechanism. Instead of physically inserting a jig pin into holes, the system uses a laser beam to optically detect the position, where the laser spot position on a scale provides precise measurement without being affected by mechanical tolerances of physical components.
2Ease of operation
If manual operation is performed for zeroing adjustment, then the adjustment can be completed, but cleanliness is degraded and adjustment time increases
Solution Approach 1:
The patent enables the system to perform zeroing adjustment automatically without human intervention. The laser beam system can detect the zero posture and the control unit can automatically adjust the connection members, allowing the system to self-correct without requiring manual operation, thereby reducing adjustment time and maintaining cleanliness.
Solution Approach 2:
The patent implements a feedback mechanism where the laser beam detects the actual position of connection members, and this detection information is fed back to the control unit. The control unit then automatically adjusts the positions based on the detected deviations, creating a closed-loop system that eliminates the need for manual adjustment and reduces time loss.
3Ease of operation
If manual operation is performed for zeroing adjustment, then the adjustment can be completed, but cleanliness in sensitive environments is degraded
Solution Approach 1:
The patent replaces manual mechanical operation with an optical detection and automated control system. The laser beam and control unit can perform zeroing adjustment remotely and automatically, eliminating the need for human operators to physically access and manipulate the connection members, thereby preventing cleanliness degradation in sensitive environments.
Solution Approach 2:
The system performs zeroing adjustment autonomously without requiring human intervention. The automated laser detection and control unit adjustment mechanism allows the system to correct its own zero posture without manual operation, thus maintaining the cleanliness of the environment while still achieving the necessary adjustment capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution allows for accurate and automatic adjustment of the zero posture without manual intervention, reducing detection errors and maintaining cleanliness in sensitive environments, while also reducing the time required for adjustment.
Implementation Method 1
a light emitting unit configured to emit a laser beam in a predetermined direction
Implementation Method 2
a light receiving unit configured to receive the laser beam when the connection member is located in a detection posture that is away, by a preset displacement amount, from a predetermined zero posture
Data Source
AI summary
The invention provides a robot including a connection member relatively displaceably connected, and configured to control the displacement of the connection member based on a reference posture that can be adjusted, the robot including: a light emitting unit to emit a laser beam in a predetermined direction; a light receiving unit to receive the laser beam when the connection member is located in a detection posture that is away, by a preset displacement amount, from a predetermined zero posture; and a zeroing unit to relatively displace the connection member so as to make the light receiving unit receive the laser beam, and then to adjust the reference posture to the zero posture based on the posture of the connection member when the laser beam is received as well as on a relationship between the zero posture and the detection posture.