Robot Tilter Hand for Substrate Transfer

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Solution Overview

Problem

Conventional substrate transfer robots require deep insertion of the end effector into cassettes, making the transfer process complex and prone to interference from arm movement.

Innovation Solution

A robot design featuring a movable arm with a tilting hand that contacts both surfaces of the substrate, allowing it to be held with forces applied to only one half, reducing the need for deep insertion and minimizing interference from arm movement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the end effector is inserted deeply into the cassette to hold the substrate, then the substrate can be securely held, but the structure becomes more complex and the operation becomes difficult

Engineering Contradiction:

Improvesubstrate holding reliabilityVSAvoidhand insertion depth

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The holder extends in the widthwise direction (lateral dimension) rather than requiring deep insertion in the vertical dimension. By contacting both the top surface and bottom surface of the substrate through lateral extension, the holder secures the substrate without needing to insert deeply into the cassette, thus resolving the contradiction between holding reliability and insertion depth complexity

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Reliability

If the hand is inserted deeply into the cassette, then the substrate can be held, but the arm movement causes stirring and slows down the transfer

Engineering Contradiction:

Improvesubstrate holding stabilityVSAvoidsubstrate transfer speed

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The holder contacts the substrate from both top and bottom surfaces through lateral extension in the widthwise direction, achieving stable holding without deep vertical insertion. This dimensional change allows the arm to move quickly without causing stirring, thus improving transfer speed while maintaining holding stability

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The holder is designed to contact both surfaces of the substrate simultaneously from the outset, establishing stable holding before arm movement begins. This preliminary configuration prevents stirring during transfer, enabling faster substrate transfer while maintaining reliability

Inventive Principle:

Principle #10Preliminary action

3Reliability

If the end effector is inserted deeply into the cassette, then the substrate can be held, but the transfer operation becomes more complex

Engineering Contradiction:

Improvesubstrate holding capabilityVSAvoidtransfer operation simplicity

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The holder extends laterally in the widthwise direction to contact both top and bottom surfaces of the substrate, achieving reliable holding without deep vertical insertion. This simplifies the transfer operation by eliminating the need for complex deep-insertion maneuvers while maintaining substrate holding capability

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS12128545B2Robot

Publication Date: 2024.10.29 KAWASAKI JUKOGYO KK

AI summary

A robot is for transferring a substrate. The robot includes an arm, a hand, and a tilter. The arm is movable. The hand is installed to the arm to project from it and holds and transfers the substrate. The tilter tilts an orientation of the hand. The hand includes a holder. The holder contacts the top surface and the bottom surface of the substrate. With the tilter, the holder holds the substrate keeping in contact with the top surface and the bottom surface of the substrate and applying forces to only one of two halves of the substrate bisected.