Horizontal Articulated Robot Via Point Control for Semiconductor Work Transfer
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Solution Overview
Problem
Current work transfer systems in semiconductor manufacturing require extensive teaching and resource-intensive computation to determine safe transfer paths, leading to increased time and complexity as the number of via points increases, especially in compact and complex environments.
Innovation Solution
A work transfer system with a horizontal articulated robot that uses a minimum number of via points, pre-specified for each quadrant, to ensure safe path determination without complex computation, by setting via points that fulfill specific interference conditions, allowing for easy teaching and safety confirmation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple transfer via points are set by teaching to ensure safe path, then transfer safety is improved, but teaching time and work resources increase
Solution Approach 1:
The working area is divided into multiple quadrants, and via points are set specifically for each quadrant. This segmentation allows the robot to determine safe paths using only a minimum number of via points per quadrant rather than requiring extensive teaching for the entire workspace, thereby reducing teaching time while maintaining transfer safety.
2Ease of manufacture
If safe path is found by computation, then teaching work is reduced, but complicated program and computation time are required
Solution Approach 1:
Via points for each quadrant are predetermined and stored in advance in the robot controller. This preliminary action eliminates the need for complicated computation programs during operation, as the robot simply retrieves and uses the pre-stored via points corresponding to the current quadrant, thereby reducing both teaching work and program complexity.
3Reliability
If number of via points in movement between stages increases, then transfer path safety is improved, but time required for actual transfer operation becomes longer
Solution Approach 1:
Different via points are set for different quadrants based on local interference conditions. This local quality approach ensures that only the necessary minimum number of via points are used for each specific quadrant and transfer operation, maintaining transfer path safety while avoiding unnecessary via points that would slow down the operation.
Data Source
AI summary
A work transfer system may include cassettes to house a work; a processing apparatus; and a robot to load and unload the work. The robot may include a base, a base link connected to the base, an arm link coupled to the base link, an arm connected to the arm link, and a hand connected to the arm. The base link and the arm link are controlled so that a center a coupling shaft of the arm link and the arm moves along a straight line. The cassettes are parallel to the straight line. A via point is specified for each quadrant of coordinate system and the robot moves between stages that are a target of loading or unloading of the work and uses the via point as a via point when moving.