Robotic Arm Gripper Sensor for Semiconductor Chamber Inspection
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Solution Overview
Problem
Modern manufacturing processes, particularly in semiconductor production, rely heavily on human expertise for quality control and maintenance, which can be inefficient and prone to errors due to the lack of automated inspection and adaptive control systems for robotic arms handling sensitive materials and devices.
Innovation Solution
The implementation of gripper hand sensors on robotic arms that collect and analyze sensor data to detect adverse conditions, such as imminent collisions or malfunctions, allowing for real-time adjustments and remediation of robotic arm routines to prevent errors and ensure safe operation within varying semiconductor processing environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If human expertise is used for quality control and maintenance, then flexibility and adaptability are maintained, but efficiency and consistency deteriorate due to manual inspection limitations
Solution Approach 1:
The robotic arm system performs self-inspection and self-correction by using its own sensor data to detect adverse conditions and automatically modify its routine, eliminating the need for external human inspection and enabling continuous autonomous operation with consistent quality control
Solution Approach 2:
The system collects sensor data from the robotic arm's perspective, analyzes it to detect adverse conditions, and uses this feedback to automatically modify the robotic arm routine, creating a closed-loop control system that improves both efficiency and reliability through continuous monitoring and adaptive response
2Productivity
If automated robotic arm routines are implemented, then productivity increases, but the ability to detect and respond to adverse conditions deteriorates without sensory feedback
Solution Approach 1:
The sensor system serves multiple functions: it collects environmental data, detects adverse conditions, provides feedback for routine modification, and enables both automated operation and adaptive response, making the robotic arm system universally capable of handling various manufacturing scenarios with improved reliability
3Reliability
If sensor data collection is added to robotic arms, then adverse condition detection improves, but system complexity increases
Solution Approach 1:
The patent combines the sensor, data collection module, analysis module, and robotic arm control into an integrated system where the sensor is positioned on the robotic arm itself, merging detection and control functions into a unified architecture that improves reliability without proportionally increasing complexity
Data Source
AI summary
In an embodiment, a system includes: an airlock; a first semiconductor processing chamber, a second semiconductor processing chamber; and a transfer module configured to move a sensor into and out of the first semiconductor processing chamber and the second semiconductor processing chamber, wherein the sensor is configured to: collect sensor data characterizing the first semiconductor processing chamber when within the first semiconductor processing chamber; and collect sensor data characterizing the second semiconductor processing chamber when within the second semiconductor processing chamber, wherein the transfer module, the first semiconductor processing chamber, and the second semiconductor processing chamber are within a controlled internal atmosphere on a first side of the airlock and separated by the airlock from an uncontrolled external atmosphere on a second side of the airlock.