Robotic Arm Lower Segment Leveling for Wafer Transport
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Solution Overview
Problem
Current robotic arm configurations in the semiconductor industry face challenges with inaccurate and time-consuming attitude adjustments, which lead to stress on components, potential energy storage causing jerky motions, and deviations from concentricity and perpendicularity, resulting in manufacturing defects and downtime.
Innovation Solution
A robotic arm assembly with a lower arm segment and radius that allows for a slight angle of rotation, combined with a three-point leveling mechanism using cap screws, ensures accurate leveling and stress-free height adjustments, maintaining wafer blades in the same horizontal plane.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional robotic arm configurations are used for wafer transport, then the robot can perform basic transport functions, but the attitude adjustments become inaccurate and time-consuming, leading to stress on components and potential energy storage causing jerky motions
Solution Approach 1:
The patent introduces a dynamic leveling mechanism that allows the lower arm segment to rotate slightly relative to the radius, enabling real-time attitude adjustments without time-consuming manual interventions. The fastener system allows the arm to be locked at precise angles, combining flexibility with precision.
Solution Approach 2:
The patent changes the geometric parameters of the robotic arm by introducing a slight angle of rotation between the lower arm segment and the radius. This angular parameter adjustment enables the wafer blade to be leveled accurately while reducing adjustment time and eliminating stress on components.
2Stability of the object's composition
If traditional rigid robotic arm structures are used, then structural stability is maintained, but deviations from concentricity and perpendicularity occur, resulting in manufacturing defects and downtime
Solution Approach 1:
The patent transforms the rigid structure into a semi-dynamic system by allowing slight rotation of the lower arm segment relative to the radius. This controlled movement compensates for deviations from concentricity and perpendicularity, maintaining both structural stability and manufacturing precision.
Solution Approach 2:
The patent applies local quality by allowing rotation only at the specific joint between the lower arm segment and the radius, while maintaining rigidity elsewhere in the structure. This localized flexibility corrects alignment deviations without compromising overall structural stability.
3Measurement precision
If frequent attitude adjustments are made to correct alignment deviations, then positioning accuracy is improved, but component stress increases and jerky motions occur due to potential energy storage
Solution Approach 1:
The patent implements preliminary action by pre-positioning the lower arm segment at the correct angle relative to the radius using the fastener system. This preliminary alignment prevents the need for frequent adjustments during operation, reducing component stress and eliminating jerky motions while maintaining positioning accuracy.
Data Source
AI summary
A robotic is provided which comprises a hub (203); (b) a first lower arm (209) comprising first (213) and second (215) lower arm segments and having a first set of upper arms (229, 231) attached thereto; and (c) a first adjusting means (241) for adjusting the height of the first lower arm segment with respect to the second lower arm segment.