Robotic Torque Driver Coordination for Uniform Fastener Sealing
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Solution Overview
Problem
The process of securing components in semiconductor manufacturing, such as fastening flow control devices to gas panels, requires precise torque to prevent leaks and damage, but manual methods are time-consuming and prone to errors, leading to uneven seal compression and increased leak risk.
Innovation Solution
An automated system using multiple robotic arms and toolheads with drivers to simultaneously torque multiple fasteners according to a predetermined torque plan, ensuring uniform seal compression and reducing manual intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual torquing methods are used, then flexibility and simplicity are maintained, but time consumption increases and precision decreases
Solution Approach 1:
The system uses vision systems to automatically detect and locate fasteners, eliminating the need for manual positioning. The robotic arm autonomously navigates to each fastener location based on coordinate data from the vision system, performing torquing operations without human intervention.
Solution Approach 2:
Manual mechanical torquing operations are replaced with an automated robotic system that integrates vision guidance, robotic manipulation, and controlled torquing. This substitution transforms a manual mechanical process into an automated electromechanical system, dramatically improving speed and precision.
2Reliability
If precise torque control is applied to each fastener, then seal integrity is improved, but the number of torque passes increases time consumption
Solution Approach 1:
The vision system performs preliminary detection and mapping of all fastener locations before torquing begins. This advance preparation allows the robotic system to efficiently plan and execute the optimal torquing sequence, reducing the total number of passes required while ensuring each fastener receives precise torque control.
Solution Approach 2:
The robotic arm continuously moves between fasteners without interruption, performing torquing operations in a streamlined sequence. The system maintains continuous productive action by immediately transitioning from one fastener to the next based on pre-determined coordinates, eliminating idle time and reducing total cycle time while maintaining precise torque control.
3Manufacturing precision
If multiple torque passes are performed to ensure uniform seal compression, then leak prevention is improved, but manufacturing efficiency decreases
Solution Approach 1:
The torquing process is segmented into discrete, programmable steps with specific torque values and sequences for different fastener groups. This segmentation allows the system to apply precise, uniform torque to each fastener independently while maintaining overall process efficiency through automated coordination.
Solution Approach 2:
The system incorporates torque sensing and feedback mechanisms that monitor the actual torque applied to each fastener in real-time. This feedback allows the system to verify torque uniformity across all fasteners and make immediate adjustments if needed, ensuring manufacturing precision without requiring multiple manual inspection and re-torquing passes.
4Measurement precision
If automated robotic systems are implemented, then torquing precision and speed are improved, but initial system complexity and cost increase
Solution Approach 1:
The robotic system is designed with universal capabilities to handle various fastener types, locations, and torque specifications through programmable control. The same robotic arm and end effector can perform multiple torquing operations across different components by simply loading different coordinate and torque parameter sets, reducing the need for multiple specialized devices.
Data Source
AI summary
A method may include receiving, by a computing system, a torque plan indicating a fastener pattern. The method may include determining, by the computing system and based at least in part on the torque plan, a respective position of each of a plurality of fasteners of the semiconductor manufacturing component. The method may include determining, by the computing system and based at least in part on the torque plan, a predetermined torque associated with each of the plurality of fasteners. The method may include causing, by the computing system, a first robotic arm to translate such that a bit tip of a first driver engages with one or more fasteners of the plurality of fasteners. The method may include causing, by the computing system, the first driver to rotate a bit of the first driver such that a fastener of the plurality of fasteners is tightened to a predetermined torque.